TY - JOUR
T1 - Phase shifting method for non-sinusoidal interference fringes with phase shift error
AU - Lian, Songzhe
AU - Yang, Haiquan
AU - Kudo, Hiroyuki
AU - Takano, Hidekazu
AU - Momose, Atsushi
N1 - Publisher Copyright:
© 2019 The Japan Society of Applied Physics.
PY - 2019
Y1 - 2019
N2 - When applying phase shifting interferometry to practical phase measurement, the wave may become non-sinusoidal, and could include some phase shift errors. Prior phase shift algorithms are primarily used for sinusoidal cases, and can cause system errors when used for these non-sinusoidal interference. We propose two phase recovery methods for non-sinusoidal interference fringes: Specifically, a least-squares-based fitting algorithm that eliminates system errors using a sufficient number of measured images, and a Fourier transform-based method that effectively suppresses system errors using a lower (or insufficient) number of images. Simulation and experimental results verify the efficacy of the proposed methods.
AB - When applying phase shifting interferometry to practical phase measurement, the wave may become non-sinusoidal, and could include some phase shift errors. Prior phase shift algorithms are primarily used for sinusoidal cases, and can cause system errors when used for these non-sinusoidal interference. We propose two phase recovery methods for non-sinusoidal interference fringes: Specifically, a least-squares-based fitting algorithm that eliminates system errors using a sufficient number of measured images, and a Fourier transform-based method that effectively suppresses system errors using a lower (or insufficient) number of images. Simulation and experimental results verify the efficacy of the proposed methods.
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U2 - 10.7567/1347-4065/ab4a96
DO - 10.7567/1347-4065/ab4a96
M3 - Article
AN - SCOPUS:85076615532
SN - 0021-4922
VL - 58
JO - Japanese Journal of Applied Physics
JF - Japanese Journal of Applied Physics
IS - 11
M1 - 112005
ER -