TY - JOUR
T1 - Photo-induced phenomena in sputtered GeO2 films
AU - Terakado, Nobuaki
AU - Tanaka, Keiji
PY - 2005
Y1 - 2005
N2 - Macroscopic and microscopic changes in sputtered GeO2 films induced by band-gap light from an ArF excimer laser have been studied. When irradiated at 1 atm, the film thickness increases, surface-roughness increases, refractive-index decreases, hygroscopic enhancements, and Ge-O-Ge distance increases. Irradiations in vacuum make these changes smaller or undetectable. These photo-induced changes are discussed from phenomenological and structural viewpoints, and compared with characteristics in GeO2-SiO2 and GeS2 films.
AB - Macroscopic and microscopic changes in sputtered GeO2 films induced by band-gap light from an ArF excimer laser have been studied. When irradiated at 1 atm, the film thickness increases, surface-roughness increases, refractive-index decreases, hygroscopic enhancements, and Ge-O-Ge distance increases. Irradiations in vacuum make these changes smaller or undetectable. These photo-induced changes are discussed from phenomenological and structural viewpoints, and compared with characteristics in GeO2-SiO2 and GeS2 films.
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U2 - 10.1016/j.jnoncrysol.2004.10.002
DO - 10.1016/j.jnoncrysol.2004.10.002
M3 - Article
AN - SCOPUS:10644249244
SN - 0022-3093
VL - 351
SP - 54
EP - 60
JO - Journal of Non-Crystalline Solids
JF - Journal of Non-Crystalline Solids
IS - 1
ER -