Photolithography for three-dimensional wiring and MEMS devices (1) spray coating of resist film

Minoru Sasaki, Kazuhiro Hane, Seiji Aoyagi

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)239-241
Number of pages3
JournalJournal of Japan Institute of Electronics Packaging
Issue number3
Publication statusPublished - 2008 May

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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