Photolithography for three-dimensional wiring and MEMS devices (1) spray coating of resist film

Minoru Sasaki; Kazuhiro Hane; Seiji Aoyagi

doi:10.5104/jiep.11.239

Photolithography for three-dimensional wiring and MEMS devices (1) spray coating of resist film

Minoru Sasaki, Kazuhiro Hane, Seiji Aoyagi

New Industry Creation Hatchery Center (NICHe)

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	239-241
Number of pages	3
Journal	Journal of Japan Institute of Electronics Packaging
Volume	11
Issue number	3
DOIs	https://doi.org/10.5104/jiep.11.239
Publication status	Published - 2008 May

ASJC Scopus subject areas

Electrical and Electronic Engineering

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10.5104/jiep.11.239

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title = "Photolithography for three-dimensional wiring and MEMS devices (1) spray coating of resist film",

author = "Minoru Sasaki and Kazuhiro Hane and Seiji Aoyagi",

year = "2008",

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journal = "Journal of Japan Institute of Electronics Packaging",

issn = "1343-9677",

publisher = "The Japan Institute of Electronics Packaging",

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AU - Aoyagi, Seiji

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JO - Journal of Japan Institute of Electronics Packaging

JF - Journal of Japan Institute of Electronics Packaging

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Photolithography for three-dimensional wiring and MEMS devices (1) spray coating of resist film

ASJC Scopus subject areas

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