Photolithography for three-dimensional wiring and MEMS devices (2) patterning

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	307-310
Number of pages	4
Journal	Journal of Japan Institute of Electronics Packaging
Volume	11
Issue number	4
DOIs	https://doi.org/10.5104/jiep.11.307
Publication status	Published - 2008 Jul

ASJC Scopus subject areas

@article{b8fa1a2e6e7d4a13a620f8ba84411eb3,

title = "Photolithography for three-dimensional wiring and MEMS devices (2) patterning",

author = "Minoru Sasaki and Kazuhiro Hane",

year = "2008",

month = jul,

doi = "10.5104/jiep.11.307",

language = "English",

volume = "11",

pages = "307--310",

journal = "Journal of Japan Institute of Electronics Packaging",

issn = "1343-9677",

publisher = "The Japan Institute of Electronics Packaging",

number = "4",

}

TY - JOUR

T1 - Photolithography for three-dimensional wiring and MEMS devices (2) patterning

AU - Sasaki, Minoru

AU - Hane, Kazuhiro

PY - 2008/7

Y1 - 2008/7

UR - http://www.scopus.com/inward/record.url?scp=84871036776&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84871036776&partnerID=8YFLogxK

U2 - 10.5104/jiep.11.307

DO - 10.5104/jiep.11.307

M3 - Article

AN - SCOPUS:84871036776

SN - 1343-9677

VL - 11

SP - 307

EP - 310

JO - Journal of Japan Institute of Electronics Packaging

JF - Journal of Japan Institute of Electronics Packaging

IS - 4

ER -