Photoluminescence emission from GaAs nanodisks in GaAs/AlGaAs nanopillar arrays fabricated by neutral beam etching

Daisuke Ohori; Atsuhiko Fukuyama; Kentaro Sakai; Akio Higo; Cedric Emmanuel Thomas; Seiji Samukawa; Tetsuo Ikari

doi:10.7567/JJAP.56.050308

Photoluminescence emission from GaAs nanodisks in GaAs/AlGaAs nanopillar arrays fabricated by neutral beam etching

Daisuke Ohori, Atsuhiko Fukuyama, Kentaro Sakai, Akio Higo, Cedric Emmanuel Thomas, Seiji Samukawa, Tetsuo Ikari

Innovative Energy Research Center

Research output: Contribution to journal › Article › peer-review

4 Citations (Scopus)

Abstract

GaAs quantum nanodisks (QNDs) in nanopillar (NP) arrays are considered to be an attractive candidate for photonic device applications. We report a damageless fabrication technique that can be used to produce large-area lattice-matched GaAs/AlGaAs heterostructure NP arrays through the use of a bio-template and neutral beam etching. We have successfully realized GaAs QNDs in NPs owing to nanoscale iron oxide masks included in poly(ethylene glycol)-decorated ferritin protein shells. We observed for first time the photoluminescence emission from asetched GaAs QNDs and confirmed quantum confinement by quantum mechanical calculation. Our methodology is vital for high-efficiency pillarbased optoelectronic devices such as NP laser diodes.

Original language	English
Article number	050308
Journal	Japanese journal of applied physics
Volume	56
Issue number	5
DOIs	https://doi.org/10.7567/JJAP.56.050308
Publication status	Published - 2017 May

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy(all)

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title = "Photoluminescence emission from GaAs nanodisks in GaAs/AlGaAs nanopillar arrays fabricated by neutral beam etching",

abstract = "GaAs quantum nanodisks (QNDs) in nanopillar (NP) arrays are considered to be an attractive candidate for photonic device applications. We report a damageless fabrication technique that can be used to produce large-area lattice-matched GaAs/AlGaAs heterostructure NP arrays through the use of a bio-template and neutral beam etching. We have successfully realized GaAs QNDs in NPs owing to nanoscale iron oxide masks included in poly(ethylene glycol)-decorated ferritin protein shells. We observed for first time the photoluminescence emission from asetched GaAs QNDs and confirmed quantum confinement by quantum mechanical calculation. Our methodology is vital for high-efficiency pillarbased optoelectronic devices such as NP laser diodes.",

author = "Daisuke Ohori and Atsuhiko Fukuyama and Kentaro Sakai and Akio Higo and Thomas, {Cedric Emmanuel} and Seiji Samukawa and Tetsuo Ikari",

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year = "2017",

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language = "English",

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T1 - Photoluminescence emission from GaAs nanodisks in GaAs/AlGaAs nanopillar arrays fabricated by neutral beam etching

AU - Ohori, Daisuke

AU - Fukuyama, Atsuhiko

AU - Sakai, Kentaro

AU - Higo, Akio

AU - Thomas, Cedric Emmanuel

AU - Samukawa, Seiji

AU - Ikari, Tetsuo

PY - 2017/5

Y1 - 2017/5

N2 - GaAs quantum nanodisks (QNDs) in nanopillar (NP) arrays are considered to be an attractive candidate for photonic device applications. We report a damageless fabrication technique that can be used to produce large-area lattice-matched GaAs/AlGaAs heterostructure NP arrays through the use of a bio-template and neutral beam etching. We have successfully realized GaAs QNDs in NPs owing to nanoscale iron oxide masks included in poly(ethylene glycol)-decorated ferritin protein shells. We observed for first time the photoluminescence emission from asetched GaAs QNDs and confirmed quantum confinement by quantum mechanical calculation. Our methodology is vital for high-efficiency pillarbased optoelectronic devices such as NP laser diodes.

AB - GaAs quantum nanodisks (QNDs) in nanopillar (NP) arrays are considered to be an attractive candidate for photonic device applications. We report a damageless fabrication technique that can be used to produce large-area lattice-matched GaAs/AlGaAs heterostructure NP arrays through the use of a bio-template and neutral beam etching. We have successfully realized GaAs QNDs in NPs owing to nanoscale iron oxide masks included in poly(ethylene glycol)-decorated ferritin protein shells. We observed for first time the photoluminescence emission from asetched GaAs QNDs and confirmed quantum confinement by quantum mechanical calculation. Our methodology is vital for high-efficiency pillarbased optoelectronic devices such as NP laser diodes.

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Photoluminescence emission from GaAs nanodisks in GaAs/AlGaAs nanopillar arrays fabricated by neutral beam etching

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