@inproceedings{aba430499ab347a7a7b8bd10dc98b9fb,
title = "Photonic crystal switch by inserting nano-crystal defects using MEMS actuator",
abstract = "A novel photonic crystal switch by inserting crystal defects using a MEMS actuator was proposed. Optical parameters for obtaining photonic crystal switch were determined. The number of air holes necessary for light switching, and allowable gaps between the air hole and silicon rod, were decided by a FDTD simulation. The fabrication techniques using electron beam lithography, fast atom beam etching and HF gas-phase etching were proposed.",
keywords = "Actuators, Atom optics, Electron optics, Etching, Finite difference methods, Micromechanical devices, Optical switches, Photonic crystals, Silicon, Time domain analysis",
author = "Y. Kanamori and K. Inoue and K. Horie and K. Hane",
note = "Publisher Copyright: {\textcopyright} 2003 IEEE.; 2003 IEEE/LEOS International Conference on Optical MEMS ; Conference date: 18-08-2003 Through 21-08-2003",
year = "2003",
doi = "10.1109/OMEMS.2003.1233489",
language = "English",
series = "2003 IEEE/LEOS International Conference on Optical MEMS",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "107--108",
booktitle = "2003 IEEE/LEOS International Conference on Optical MEMS",
address = "United States",
}