TY - GEN
T1 - Photothermal transducer based on ultrathin bimetal Si resonator
AU - Ono, Takahito
AU - Yoshida, Shinya
AU - Kawai, Yusuke
AU - Esashi, Masayoshi
PY - 2007
Y1 - 2007
N2 - In this paper, we present a photothermal transducer consisted of an ultrathin Au/Si bimetal cantilever as a resonator with a total thickness of 45 nm and quality factor of ∼ 12000. Due to the high quality factor and small size, this transducer is sensitive to photothermal effect and its thermal response frequency can be up to 140 kHz. It is demonstrated that the irradiation of weak laser can enhance the response of the transducer due to the nonlinear photothermal effect. The mechanical FM detection of modulated light is demonstrated using this bimetal transducer.
AB - In this paper, we present a photothermal transducer consisted of an ultrathin Au/Si bimetal cantilever as a resonator with a total thickness of 45 nm and quality factor of ∼ 12000. Due to the high quality factor and small size, this transducer is sensitive to photothermal effect and its thermal response frequency can be up to 140 kHz. It is demonstrated that the irradiation of weak laser can enhance the response of the transducer due to the nonlinear photothermal effect. The mechanical FM detection of modulated light is demonstrated using this bimetal transducer.
UR - http://www.scopus.com/inward/record.url?scp=52249086896&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=52249086896&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:52249086896
SN - 1424409519
SN - 9781424409518
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 639
EP - 642
BT - Proceedings - CIS Workshops 2007, 2007 International Conference on Computational Intelligence and Security Workshops, CISW 2007
T2 - 20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007
Y2 - 21 January 2007 through 25 January 2007
ER -