Abstract
Photothermal vibration of a quartz core of an optical fiber is described. A microcantilever rod comprised of the quartz core was fabricated by etching the clad layer from the optical fiber tip, and was vibrated photothermally using a laser diode. Frequency dependence of the vibration amplitude of the cantilever was measured for vacuum sensing. The resonance frequency decreased from 16.69 to 16.59 kHz with increase of the pressure from 10° to 102 Pa, and the resonance sharpness Q decreased from 2000 to 700 with increase of the pressure from 102 to 105 Pa.
| Original language | English |
|---|---|
| Pages (from-to) | 2018-2021 |
| Number of pages | 4 |
| Journal | Japanese Journal of Applied Physics |
| Volume | 34 |
| Issue number | 4R |
| DOIs | |
| Publication status | Published - 1995 Apr |
Keywords
- Fiber core
- Microcantilever
- Optical fiber sensor
- Optical sensor
- Photothermal vibration
- Vacuum gauge