Physicochemical Properties and Structure of SiCxNy:Fe Films Grown From a Gas Mixture of Ferrocene, Hydrogen and 1,1,3,3,5,5-Hexamethylcyclotrisilazane

N. I. Fainer; R. V. Pushkarev; S. B. Ehrenburg; S. V. Trubina; V. A. Shestakov; I. S. Merenkov; M. Terauchi

doi:10.1134/S0022476618070107

Physicochemical Properties and Structure of SiC_xN_y:Fe Films Grown From a Gas Mixture of Ferrocene, Hydrogen and 1,1,3,3,5,5-Hexamethylcyclotrisilazane

N. I. Fainer, R. V. Pushkarev, S. B. Ehrenburg, S. V. Trubina, V. A. Shestakov, I. S. Merenkov, M. Terauchi

IMRAM - Division of Measurements

RAS - Nikolaev Institute of Inorganic Chemistry, Siberian Branch

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

Abstract

Raman spectroscopy, high-resolution transmission electron microscopy (HRTEM), and EXAFS spectroscopy are used to study the composition and structure of SiC_xN_y:Fe films obtained by chemical vapor deposition (CVD) in the Fe–Si–C–N–H system from a mixture of hydrogen, ferrocene (C₅H₅)₂Fe, and organosilicon compound 1,1,3,3,5,5–hexamethylcyclotrisilazane (HMCTS) C₆H₂₁N₃Si₃. The films are deposited under low pressures (LPCVD) at 1123–1273 K, and their phase composition at 300–1300 K is predicted using thermodynamic modeling. The obtained films are nanocomposites with amorphous matrices containing α-Fe crystallites and carbon clusters with a size of 5–10 nm.

Original language	English
Pages (from-to)	1588-1595
Number of pages	8
Journal	Journal of Structural Chemistry
Volume	59
Issue number	7
DOIs	https://doi.org/10.1134/S0022476618070107
Publication status	Published - 2018 Dec 1

Keywords

1,1,3,3,5,5-hexamethylcyclotrisilazane
CVD
ferrocene
HRTEM and EXAFS spectroscopy
nanocomposite films
Raman
thermodynamic modeling

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@article{6f4af694b2ba4200936f2809d7b074ca,

title = "Physicochemical Properties and Structure of SiCxNy:Fe Films Grown From a Gas Mixture of Ferrocene, Hydrogen and 1,1,3,3,5,5-Hexamethylcyclotrisilazane",

abstract = "Raman spectroscopy, high-resolution transmission electron microscopy (HRTEM), and EXAFS spectroscopy are used to study the composition and structure of SiCxNy:Fe films obtained by chemical vapor deposition (CVD) in the Fe–Si–C–N–H system from a mixture of hydrogen, ferrocene (C5H5)2Fe, and organosilicon compound 1,1,3,3,5,5–hexamethylcyclotrisilazane (HMCTS) C6H21N3Si3. The films are deposited under low pressures (LPCVD) at 1123–1273 K, and their phase composition at 300–1300 K is predicted using thermodynamic modeling. The obtained films are nanocomposites with amorphous matrices containing α-Fe crystallites and carbon clusters with a size of 5–10 nm.",

keywords = "1,1,3,3,5,5-hexamethylcyclotrisilazane, CVD, ferrocene, HRTEM and EXAFS spectroscopy, nanocomposite films, Raman, thermodynamic modeling",

author = "Fainer, {N. I.} and Pushkarev, {R. V.} and Ehrenburg, {S. B.} and Trubina, {S. V.} and Shestakov, {V. A.} and Merenkov, {I. S.} and M. Terauchi",

note = "Publisher Copyright: {\textcopyright} 2018, Pleiades Publishing, Ltd.",

year = "2018",

month = dec,

day = "1",

doi = "10.1134/S0022476618070107",

language = "English",

volume = "59",

pages = "1588--1595",

journal = "Journal of Structural Chemistry",

issn = "0022-4766",

publisher = "Pleiades Publishing",

number = "7",

}

TY - JOUR

T1 - Physicochemical Properties and Structure of SiCxNy:Fe Films Grown From a Gas Mixture of Ferrocene, Hydrogen and 1,1,3,3,5,5-Hexamethylcyclotrisilazane

AU - Fainer, N. I.

AU - Pushkarev, R. V.

AU - Ehrenburg, S. B.

AU - Trubina, S. V.

AU - Shestakov, V. A.

AU - Merenkov, I. S.

AU - Terauchi, M.

PY - 2018/12/1

Y1 - 2018/12/1

N2 - Raman spectroscopy, high-resolution transmission electron microscopy (HRTEM), and EXAFS spectroscopy are used to study the composition and structure of SiCxNy:Fe films obtained by chemical vapor deposition (CVD) in the Fe–Si–C–N–H system from a mixture of hydrogen, ferrocene (C5H5)2Fe, and organosilicon compound 1,1,3,3,5,5–hexamethylcyclotrisilazane (HMCTS) C6H21N3Si3. The films are deposited under low pressures (LPCVD) at 1123–1273 K, and their phase composition at 300–1300 K is predicted using thermodynamic modeling. The obtained films are nanocomposites with amorphous matrices containing α-Fe crystallites and carbon clusters with a size of 5–10 nm.

AB - Raman spectroscopy, high-resolution transmission electron microscopy (HRTEM), and EXAFS spectroscopy are used to study the composition and structure of SiCxNy:Fe films obtained by chemical vapor deposition (CVD) in the Fe–Si–C–N–H system from a mixture of hydrogen, ferrocene (C5H5)2Fe, and organosilicon compound 1,1,3,3,5,5–hexamethylcyclotrisilazane (HMCTS) C6H21N3Si3. The films are deposited under low pressures (LPCVD) at 1123–1273 K, and their phase composition at 300–1300 K is predicted using thermodynamic modeling. The obtained films are nanocomposites with amorphous matrices containing α-Fe crystallites and carbon clusters with a size of 5–10 nm.

KW - 1,1,3,3,5,5-hexamethylcyclotrisilazane

KW - CVD

KW - ferrocene

KW - HRTEM and EXAFS spectroscopy

KW - nanocomposite films

KW - Raman

KW - thermodynamic modeling

UR - http://www.scopus.com/inward/record.url?scp=85058650495&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85058650495&partnerID=8YFLogxK

U2 - 10.1134/S0022476618070107

DO - 10.1134/S0022476618070107

M3 - Article

AN - SCOPUS:85058650495

SN - 0022-4766

VL - 59

SP - 1588

EP - 1595

JO - Journal of Structural Chemistry

JF - Journal of Structural Chemistry

IS - 7

ER -

Physicochemical Properties and Structure of SiC_xN_y:Fe Films Grown From a Gas Mixture of Ferrocene, Hydrogen and 1,1,3,3,5,5-Hexamethylcyclotrisilazane

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