TY - GEN
T1 - Piezoelectric actuator integrated cantilever with tunable spring constant for atom probe
AU - Kawai, Yusuke
AU - Ono, Takahito
AU - Meyer, Ernst
AU - Gerber, Christoph
AU - Esashi, Masayoshi
PY - 2006
Y1 - 2006
N2 - A scanning probe for time-of-flight scanning force microscopy (TOF-SFM) with Pb(Zr, Ti)O3 (PZT) thin film actuators is designed and fabricated. This probe is designed to pick up an atom or molecule under SFM mode, and emits them to a TOF mass analyzer using field-assisted evaporation for analyzing its mass (AP; atom probe). For this operation, the probe should be actuated with a large displacement in order to exactly place the end of probe at the front of an extra electrode. The small spring constant of the probe is advantageous for obtaining large actuation, but the instability is caused during surface imaging due to pull-in. Therefore, a tuning actuator, which varies the stiffness of the probe with its active deformation, is integrated. The probe is fabricated using Si micromachining from a SOI wafer on which the PZT is deposited by sputtering. The fabricated probe generates a static displacement up to 15 μm with an applied voltage of 5V, also tuning of the spring constant is demonstrated.
AB - A scanning probe for time-of-flight scanning force microscopy (TOF-SFM) with Pb(Zr, Ti)O3 (PZT) thin film actuators is designed and fabricated. This probe is designed to pick up an atom or molecule under SFM mode, and emits them to a TOF mass analyzer using field-assisted evaporation for analyzing its mass (AP; atom probe). For this operation, the probe should be actuated with a large displacement in order to exactly place the end of probe at the front of an extra electrode. The small spring constant of the probe is advantageous for obtaining large actuation, but the instability is caused during surface imaging due to pull-in. Therefore, a tuning actuator, which varies the stiffness of the probe with its active deformation, is integrated. The probe is fabricated using Si micromachining from a SOI wafer on which the PZT is deposited by sputtering. The fabricated probe generates a static displacement up to 15 μm with an applied voltage of 5V, also tuning of the spring constant is demonstrated.
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M3 - Conference contribution
AN - SCOPUS:33750097690
SN - 0780394755
SN - 9780780394759
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 778
EP - 781
BT - 19th IEEE International Conference on Micro Electro Mechanical Systems
T2 - 19th IEEE International Conference on Micro Electro Mechanical Systems
Y2 - 22 January 2006 through 26 January 2006
ER -