Piezoresistive rotation angle sensor integrated in micromirror

Minoru Sasaki, Motoki Tabata, Tsukasa Haga, Kazuhiro Hane

Research output: Contribution to journalArticlepeer-review

31 Citations (Scopus)


A piezoresistive rotation angle sensor is integrated in a micromirror device. The sensor signal is the voltage generated by the shear piezoresistance effect. This sensor has the advantage of being a single element which can be included in a torsion bar. The sensor signal is confirmed to be proportional to the mirror rotation. By taking advantage of the crystal orientation dependence, the sensor can be designed to be sensitive to the mirror rotation and insensitive to the shift motion.

Original languageEnglish
Pages (from-to)3789-3793
Number of pages5
JournalJapanese Journal of Applied Physics
Issue number4 B
Publication statusPublished - 2006 Apr 25


  • Microactuator
  • Micromirror
  • Rotation angle sensor
  • Shear piezoresistance coefficient


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