Planar-type thermoelectric micro devices using ceramic catalytic combustor

Woosuck Shin, Takaomi Nakashima, Maiko Nishibori, Noriya Izu, Toshio Itoh, Ichiro Matsubara

Research output: Contribution to journalArticlepeer-review

14 Citations (Scopus)


Thin-film couples of BiSbTe and Pt were deposited by RF sputtering and patterned by lift-off technique to form thermopile structures. To fabricate a planar micro-TE-generator, 11 thermopiles are connected in series as an array and Pt-loaded alumina ceramic catalyst was deposited on the thermopile as a combustor layer. The combustion and TE performance of the generator was investigated flowing 3 v/v% hydrogen in air into the test chamber; the average temperature gradient of eleven thermopiles developed between the hot and cold junctions of thermopiles was 50.6 K, and 1.9 μW of power was generated.

Original languageEnglish
Pages (from-to)S36-S40
JournalCurrent Applied Physics
Issue number4 SUPPL.
Publication statusPublished - 2011 Jul


  • BiSbTe
  • Catalyst
  • Micro-generator
  • Seebeck
  • Thermoelectric
  • Thin films


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