Plasmonic terahertz emitters with high-aspect ratio metal gratings

D. V. Lavrukhin, A. E. Yachmenev, I. A. Glinskiy, R. A. Khabibullin, M. Ryzhii, T. Otsuji, M. Shur, K. I. Zaytsev, D. S. Ponomarev

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

3 Citations (Scopus)


We propose a novel technology for fabricating plasmonic photoconductive antennas (PCAs) based on superlattice (SL) with increased height of the plasmonic gratings up to 100 nm. We passivate the surface of the SL by Si3N4, etch there windows and deposit Ti/Au antenna metallization. The plasmonic gratings are formed by electron-beam lithography with Ti/Au metallization followed by lift-off. Then an Al2O3 anti-reflection coating layer for reduction of the Fresnel reflection losses is used on the top of the plasmonic gratings, which also serves for maintaining its mechanical stability and providing the excitation of guided modes at the resonant wavelengths of the subwavelength slab waveguide formed by the metal gratings. Current-voltage measurements under femtosecond laser illumination reveal strong increase of the transient photocurrent generated by the fabricated plasmonic PCA which is 15 times higher than for conventional one (i.e. without the plasmonic gratings). The obtained terahertz (THz) power spectra demonstrate 100-times increase of the THz power in the plasmonic PCA. The results might be of interest to the needs of THz spectroscopy and imaging systems, in particular, operating with low-power lasers.

Original languageEnglish
Title of host publicationInternational Conference on Micro- and Nano-Electronics 2018
EditorsVladimir F. Lukichev, Konstantin V. Rudenko
ISBN (Electronic)9781510627093
Publication statusPublished - 2019
EventInternational Conference on Micro- and Nano-Electronics 2018, ICMNE 2018 - Zvenigorod, Russian Federation
Duration: 2018 Oct 12018 Oct 5

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X


ConferenceInternational Conference on Micro- and Nano-Electronics 2018, ICMNE 2018
Country/TerritoryRussian Federation


  • broadband terahertz spectra
  • InGaAs
  • optical-to-terahertz conversion eciency
  • PCA
  • photoconductive antenna
  • photoconductive substrates
  • plasmonic antennas
  • plasmonic gratings
  • superlattices
  • terahertz emitters
  • terahertz pulsed spectroscopy
  • terahertz technology


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