Polarization ray-tracing model for orthogonal two-axis Lloyd's mirror interference lithography

Xiuguo Chen; Zongwei Ren; Yuanliu Chen; Yuki Shimizu; Wei Gao

doi:10.1299/jsmelem.2017.9.113

Polarization ray-tracing model for orthogonal two-axis Lloyd's mirror interference lithography

Xiuguo Chen, Zongwei Ren, Yuanliu Chen, Yuki Shimizu, Wei Gao

ENG - Finemechanics

Tohoku University

Research output: Contribution to conference › Paper › peer-review

1 Citation (Scopus)

Abstract

In this work, we establish a three-dimensional (3D) polarization ray-tracing model to trace the evolution of polarization states of incident beams through the corner-cube-like interferometer unit of an orthogonal two-axis Lloyd's mirror interferometer. Compared with the conventional two-dimensional Jones matrix formalism, the 3D polarization ray-tracing model that represents polarization as a three-element electric field vector in the global coordinate system provides an easier approach to trace the polarization evolution. The comparison between the simulated and experimental interference fringes obtained under different combinations of initial polarization states of incident beams verify the feasibility of the established model.

Original language	English
DOIs	https://doi.org/10.1299/jsmelem.2017.9.113
Publication status	Published - 2017 Nov 13
Event	9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017 - Hiroshima City, Japan Duration: 2017 Nov 13 → 2017 Nov 17

Conference

Conference	9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017
Country/Territory	Japan
City	Hiroshima City
Period	17/11/13 → 17/11/17

Keywords

Interference lithography
Multi-beam interference
Optical encoder
Polarization evolution
Polarization ray-tracing
Scale grating

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10.1299/jsmelem.2017.9.113

Cite this

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title = "Polarization ray-tracing model for orthogonal two-axis Lloyd's mirror interference lithography",

abstract = "In this work, we establish a three-dimensional (3D) polarization ray-tracing model to trace the evolution of polarization states of incident beams through the corner-cube-like interferometer unit of an orthogonal two-axis Lloyd's mirror interferometer. Compared with the conventional two-dimensional Jones matrix formalism, the 3D polarization ray-tracing model that represents polarization as a three-element electric field vector in the global coordinate system provides an easier approach to trace the polarization evolution. The comparison between the simulated and experimental interference fringes obtained under different combinations of initial polarization states of incident beams verify the feasibility of the established model.",

keywords = "Interference lithography, Multi-beam interference, Optical encoder, Polarization evolution, Polarization ray-tracing, Scale grating",

author = "Xiuguo Chen and Zongwei Ren and Yuanliu Chen and Yuki Shimizu and Wei Gao",

note = "Funding Information: This research was supported by the Japan Society for the Promotion of Science (JSPS) (Grant number 15H05759) and Mitutoyo Science Foundation.; 9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017 ; Conference date: 13-11-2017 Through 17-11-2017",

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doi = "10.1299/jsmelem.2017.9.113",

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T1 - Polarization ray-tracing model for orthogonal two-axis Lloyd's mirror interference lithography

AU - Chen, Xiuguo

AU - Ren, Zongwei

AU - Chen, Yuanliu

AU - Shimizu, Yuki

AU - Gao, Wei

N1 - Funding Information: This research was supported by the Japan Society for the Promotion of Science (JSPS) (Grant number 15H05759) and Mitutoyo Science Foundation.

PY - 2017/11/13

Y1 - 2017/11/13

N2 - In this work, we establish a three-dimensional (3D) polarization ray-tracing model to trace the evolution of polarization states of incident beams through the corner-cube-like interferometer unit of an orthogonal two-axis Lloyd's mirror interferometer. Compared with the conventional two-dimensional Jones matrix formalism, the 3D polarization ray-tracing model that represents polarization as a three-element electric field vector in the global coordinate system provides an easier approach to trace the polarization evolution. The comparison between the simulated and experimental interference fringes obtained under different combinations of initial polarization states of incident beams verify the feasibility of the established model.

AB - In this work, we establish a three-dimensional (3D) polarization ray-tracing model to trace the evolution of polarization states of incident beams through the corner-cube-like interferometer unit of an orthogonal two-axis Lloyd's mirror interferometer. Compared with the conventional two-dimensional Jones matrix formalism, the 3D polarization ray-tracing model that represents polarization as a three-element electric field vector in the global coordinate system provides an easier approach to trace the polarization evolution. The comparison between the simulated and experimental interference fringes obtained under different combinations of initial polarization states of incident beams verify the feasibility of the established model.

KW - Interference lithography

KW - Multi-beam interference

KW - Optical encoder

KW - Polarization evolution

KW - Polarization ray-tracing

KW - Scale grating

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U2 - 10.1299/jsmelem.2017.9.113

DO - 10.1299/jsmelem.2017.9.113

M3 - Paper

AN - SCOPUS:85041290389

T2 - 9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017

Y2 - 13 November 2017 through 17 November 2017

ER -

Polarization ray-tracing model for orthogonal two-axis Lloyd's mirror interference lithography

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Keywords

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