Portable pyroelectric electron probe microanalyzer with a spot size of 40 μm

Susumu Imashuku; Kazuaki Wagatsuma

doi:10.1063/1.4976577

Portable pyroelectric electron probe microanalyzer with a spot size of 40 μm

Susumu Imashuku, Kazuaki Wagatsuma

IMR - Materials Processing and Characterization Division

Tohoku University

Research output: Contribution to journal › Article › peer-review

5 Citations (Scopus)

Abstract

We report a method of reducing the spot size of an electron beam in a portable pyroelectric electron probe microanalyzer (EPMA) and its application to on-site microanalysis. An electron beam with a spot size of 40 μm full width at half maximum was achieved by preventing the production of an electric field on the side of a needle tip set on the pyroelectric crystal in the EPMA by coating the side of the tip with an insulating material. This spot size was approximately 10 times smaller than that previously reported. We were able to acquire a line scan profile of a thin copper line sputtered on a silicon substrate using the portable pyroelectric EPMA. The width of the sputtered copper evaluated from the line scan profile (120 μm) corresponded to that from a line scan profile obtained by conventional stationary scanning electron microscope-energy dispersive X-ray spectroscopy equipment.

Original language	English
Article number	023117
Journal	Review of Scientific Instruments
Volume	88
Issue number	2
DOIs	https://doi.org/10.1063/1.4976577
Publication status	Published - 2017 Feb 1

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title = "Portable pyroelectric electron probe microanalyzer with a spot size of 40 μm",

abstract = "We report a method of reducing the spot size of an electron beam in a portable pyroelectric electron probe microanalyzer (EPMA) and its application to on-site microanalysis. An electron beam with a spot size of 40 μm full width at half maximum was achieved by preventing the production of an electric field on the side of a needle tip set on the pyroelectric crystal in the EPMA by coating the side of the tip with an insulating material. This spot size was approximately 10 times smaller than that previously reported. We were able to acquire a line scan profile of a thin copper line sputtered on a silicon substrate using the portable pyroelectric EPMA. The width of the sputtered copper evaluated from the line scan profile (120 μm) corresponded to that from a line scan profile obtained by conventional stationary scanning electron microscope-energy dispersive X-ray spectroscopy equipment.",

author = "Susumu Imashuku and Kazuaki Wagatsuma",

note = "Funding Information: We greatly appreciate Professor Naoto Todoroki, Tohoku University, for showing us the method of fabricating a needle with a sharp tip. Financial support for the present study was provided by a Promotion Grant and JSPS KAKENHI Grant No. 26709056. Publisher Copyright: {\textcopyright} 2017 Author(s).",

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N1 - Funding Information: We greatly appreciate Professor Naoto Todoroki, Tohoku University, for showing us the method of fabricating a needle with a sharp tip. Financial support for the present study was provided by a Promotion Grant and JSPS KAKENHI Grant No. 26709056. Publisher Copyright: © 2017 Author(s).

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N2 - We report a method of reducing the spot size of an electron beam in a portable pyroelectric electron probe microanalyzer (EPMA) and its application to on-site microanalysis. An electron beam with a spot size of 40 μm full width at half maximum was achieved by preventing the production of an electric field on the side of a needle tip set on the pyroelectric crystal in the EPMA by coating the side of the tip with an insulating material. This spot size was approximately 10 times smaller than that previously reported. We were able to acquire a line scan profile of a thin copper line sputtered on a silicon substrate using the portable pyroelectric EPMA. The width of the sputtered copper evaluated from the line scan profile (120 μm) corresponded to that from a line scan profile obtained by conventional stationary scanning electron microscope-energy dispersive X-ray spectroscopy equipment.

AB - We report a method of reducing the spot size of an electron beam in a portable pyroelectric electron probe microanalyzer (EPMA) and its application to on-site microanalysis. An electron beam with a spot size of 40 μm full width at half maximum was achieved by preventing the production of an electric field on the side of a needle tip set on the pyroelectric crystal in the EPMA by coating the side of the tip with an insulating material. This spot size was approximately 10 times smaller than that previously reported. We were able to acquire a line scan profile of a thin copper line sputtered on a silicon substrate using the portable pyroelectric EPMA. The width of the sputtered copper evaluated from the line scan profile (120 μm) corresponded to that from a line scan profile obtained by conventional stationary scanning electron microscope-energy dispersive X-ray spectroscopy equipment.

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Portable pyroelectric electron probe microanalyzer with a spot size of 40 μm

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