The positron annihilation lifetimes of He-ion-irradiated Fe samples were measured by a pulsed positron beam technique. The relative thickness of the surface oxidation layer was measured by Auger microprobe measurements. Unirradiated samples with different surface oxidation layer thicknesses had very similar second lifetime component intensities, indicating that the surface oxidation layer thickness does not affect positron lifetime spectra. In lifetime measurements using 10-keV positrons, the second lifetime component decreased monotonically with increasing irradiation dose. The mean lifetime in the 10-keV measurements was longer than that in 15-keV measurements (which correspond to the peak region of vacancy production); this is thought to be due to vacancy clusters absorbing He atoms.