Potential of acoustic imaging in the detection of nanometer gaps

Hironori Tohmyoh; Masumi Saka; Hayato Hirayama

doi:10.1109/TUFFC.2006.196

Potential of acoustic imaging in the detection of nanometer gaps

Hironori Tohmyoh, Masumi Saka, Hayato Hirayama

ENG - Finemechanics

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Abstract

The potential of the water-immersion and dry-contact acoustic imaging techniques for detecting nanometer gaps embedded in silicon is studied. The sensitivity for detecting gaps of over 10 nm in height is governed only by the lateral resolution of the imaging and is independent of the height of the gap.

Original language	English
Pages (from-to)	2481-2483
Number of pages	3
Journal	IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
Volume	53
Issue number	12
DOIs	https://doi.org/10.1109/TUFFC.2006.196
Publication status	Published - 2006 Dec

ASJC Scopus subject areas

Instrumentation
Acoustics and Ultrasonics
Electrical and Electronic Engineering

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10.1109/TUFFC.2006.196

Cite this

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title = "Potential of acoustic imaging in the detection of nanometer gaps",

abstract = "The potential of the water-immersion and dry-contact acoustic imaging techniques for detecting nanometer gaps embedded in silicon is studied. The sensitivity for detecting gaps of over 10 nm in height is governed only by the lateral resolution of the imaging and is independent of the height of the gap.",

author = "Hironori Tohmyoh and Masumi Saka and Hayato Hirayama",

note = "Funding Information: Manuscript received October 8, 2005; accepted July 7, 2006. This work was partly supported by the Ministry of Education, Culture, Sports, Science and Technology, Japan, under a Grant-in-Aid for Young Scientists (B) 17760072 and by the Ono Acoustics Research Fund. A part of this work was performed at the Venture Business Laboratory at Tohoku University.",

year = "2006",

month = dec,

doi = "10.1109/TUFFC.2006.196",

language = "English",

volume = "53",

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AU - Tohmyoh, Hironori

AU - Saka, Masumi

AU - Hirayama, Hayato

N1 - Funding Information: Manuscript received October 8, 2005; accepted July 7, 2006. This work was partly supported by the Ministry of Education, Culture, Sports, Science and Technology, Japan, under a Grant-in-Aid for Young Scientists (B) 17760072 and by the Ono Acoustics Research Fund. A part of this work was performed at the Venture Business Laboratory at Tohoku University.

PY - 2006/12

Y1 - 2006/12

N2 - The potential of the water-immersion and dry-contact acoustic imaging techniques for detecting nanometer gaps embedded in silicon is studied. The sensitivity for detecting gaps of over 10 nm in height is governed only by the lateral resolution of the imaging and is independent of the height of the gap.

AB - The potential of the water-immersion and dry-contact acoustic imaging techniques for detecting nanometer gaps embedded in silicon is studied. The sensitivity for detecting gaps of over 10 nm in height is governed only by the lateral resolution of the imaging and is independent of the height of the gap.

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ER -

Potential of acoustic imaging in the detection of nanometer gaps

Abstract

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