Power MEMS for new services and environment

Power MEMS is a micro device which generates electricity. The device plays an important role from the viewpoints of creating new services, solving business and environmental problems in the fields of mobile phones, personal computers, and remotely controlled or autonomous monitoring systems in ubiquitous networks. These systems need cost-effective, long-lifetime electric energy supplies, although to date these have usually been electrochemical batteries which have to be replaced or recharged. This report describes power MEMS that are expected to replace electrochemical batteries in the field of low-power industrial and consumer electronic devices.