Fingerprint
Dive into the research topics of 'Prebaking and silicon epitaxial growth enhanced by UV radiation'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Prebaking and silicon epitaxial growth enhanced by UV radiation
A. Ishitani, Y. Ohshita, K. Tanigaki, K. Takada, S. Itoh
Research output: Contribution to journal › Article › peer-review
15
Citations
(Scopus)