Precise automatic alignment of pinhole integrated with photodiode

Minoru Sasaki, Yuji Arai, Wataru Kamada, Kazuhiro Hane

Research output: Contribution to journalConference articlepeer-review


The spatial filter of a Si micromachined pinhole integrated with photodiodes is fabricated. The photodiode cells placed around the center pinhole can detect the relative position between the incident beam spot and the pinhole. In our previous study, the automatic alignment of the pinhole realized the accuracy of 1 μm using the feedback control based on the obtained position signal. To increase the alignment accuracy, the suitable design of the pinhole and the photodiode cell is necessary, since it decides the sensitivity to the laser spot position. The sensitivity is examined changing the separation length between the photodiode cells.

Original languageEnglish
Pages (from-to)413-416
Number of pages4
JournalProceedings of SPIE - The International Society for Optical Engineering
Publication statusPublished - 1998
EventOptoelectronic Materials and Devices - Taipei, Taiwan, Province of China
Duration: 1998 Jul 91998 Jul 11


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