Precise motion control of a nanopositioning PZT microstage using integrated capacitive displacement sensors

H. G. Xu, Takahito Ono, Masayoshi Esashi

Research output: Contribution to journalArticlepeer-review

52 Citations (Scopus)


We propose a hysteresis and drift compensation scheme using proportional-integral feedback control for a nanopositioning Pb(ZrTi)O 3 (PZT) microstage. A multi-degree of freedom PZT microstage with integrated differential capacitive displacement sensors has been fabricated and tested, demonstrating the feasibility of compensating for hysteresis and creep. The feedback signal to the PZT actuators is fed from differential capacitive sensors of the displacement of the microstage. Experimental results show that the sensitivity of the displacement sensor is approximately 0.53 V νm -1. A maximum resolution of 16 nm is achieved when hysteresis is compensated for, and the minimum detectable variation of capacitance ΔC is 1.25 × 10-3 pF. The hysteresis of the system varies with the proportional gain Kp, integral time constant Ti and reference input frequency. By using feedback control with a proportional and integration (PI) controller, the hysteresis decreases from 30% in open-loop operation to approximately 1% in closed-loop operation at a gain of 20, when the frequency of the sine reference input is 1 Hz and Ti is 20 ms. Efficient compensation of hysteresis is validated by the closed-loop control, especially when the frequency of the reference input is low. Elimination of creep/drift is also verified by the closed-loop control.

Original languageEnglish
Article number031
Pages (from-to)2747-2754
Number of pages8
JournalJournal of Micromechanics and Microengineering
Issue number12
Publication statusPublished - 2006 Dec 1

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering


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