Precise wavelength control for DFB laser diodes by novel corrugation delineation method

Y. Muroya; T. Nakamura; H. Yamada; T. Torikai

doi:10.1109/68.556049

Precise wavelength control for DFB laser diodes by novel corrugation delineation method

Y. Muroya, T. Nakamura, H. Yamada, T. Torikai

Research output: Contribution to journal › Article › peer-review

19 Citations (Scopus)

Abstract

Precise wavelength control of a multiple-wavelength DFB laser-diode (LD) array was achieved using weighted-dose allocation variable-pitch EB-lithography (WAVE) and highly uniform MOVPE. Multiple-wavelength 1.3 μm λ/4-shifted DFB LD arrays with wavelength spacing of 2.0 nm were successfully demonstrated. The standard deviation of the wavelength was as low as 0.37 nm over 2-in wafers.

Original language	English
Pages (from-to)	288-290
Number of pages	3
Journal	IEEE Photonics Technology Letters
Volume	9
Issue number	3
DOIs	https://doi.org/10.1109/68.556049
Publication status	Published - 1997 Mar
Externally published	Yes

Keywords

Distributed feedback lasers
Electron beam lithography
Gratings
Semiconductor laser arrays
Wavelength division multiplexing

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Electrical and Electronic Engineering

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10.1109/68.556049

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abstract = "Precise wavelength control of a multiple-wavelength DFB laser-diode (LD) array was achieved using weighted-dose allocation variable-pitch EB-lithography (WAVE) and highly uniform MOVPE. Multiple-wavelength 1.3 μm λ/4-shifted DFB LD arrays with wavelength spacing of 2.0 nm were successfully demonstrated. The standard deviation of the wavelength was as low as 0.37 nm over 2-in wafers.",

keywords = "Distributed feedback lasers, Electron beam lithography, Gratings, Semiconductor laser arrays, Wavelength division multiplexing",

author = "Y. Muroya and T. Nakamura and H. Yamada and T. Torikai",

year = "1997",

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volume = "9",

pages = "288--290",

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AU - Muroya, Y.

AU - Nakamura, T.

AU - Yamada, H.

AU - Torikai, T.

PY - 1997/3

Y1 - 1997/3

N2 - Precise wavelength control of a multiple-wavelength DFB laser-diode (LD) array was achieved using weighted-dose allocation variable-pitch EB-lithography (WAVE) and highly uniform MOVPE. Multiple-wavelength 1.3 μm λ/4-shifted DFB LD arrays with wavelength spacing of 2.0 nm were successfully demonstrated. The standard deviation of the wavelength was as low as 0.37 nm over 2-in wafers.

AB - Precise wavelength control of a multiple-wavelength DFB laser-diode (LD) array was achieved using weighted-dose allocation variable-pitch EB-lithography (WAVE) and highly uniform MOVPE. Multiple-wavelength 1.3 μm λ/4-shifted DFB LD arrays with wavelength spacing of 2.0 nm were successfully demonstrated. The standard deviation of the wavelength was as low as 0.37 nm over 2-in wafers.

KW - Distributed feedback lasers

KW - Electron beam lithography

KW - Gratings

KW - Semiconductor laser arrays

KW - Wavelength division multiplexing

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JO - IEEE Photonics Technology Letters

JF - IEEE Photonics Technology Letters

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ER -

Precise wavelength control for DFB laser diodes by novel corrugation delineation method

Abstract

Keywords

ASJC Scopus subject areas

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