Precision optical displacement sensor based on ultra-thin film photodiode type optical interferometers

Yigui Li; Xiaoyu Mi; Minoru Sasaki; Kazihiro Hane

doi:10.1088/0957-0233/14/4/311

Precision optical displacement sensor based on ultra-thin film photodiode type optical interferometers

Yigui Li, Xiaoyu Mi, Minoru Sasaki, Kazihiro Hane

ENG - Finemechanics

Research output: Contribution to journal › Article › peer-review

15 Citations (Scopus)

Abstract

The design and fabrication of our compact precision optical displacement sensor (PODS) are based on the newly developed ultra-thin film photodiode with its active layer thinner than a half of the incident light wavelength. In this paper, a detailed description of the principle, design, fabrication process and performance of PODS for application in both smooth and rough surfaces will be given.

Original language	English
Pages (from-to)	479-483
Number of pages	5
Journal	Measurement Science and Technology
Volume	14
Issue number	4
DOIs	https://doi.org/10.1088/0957-0233/14/4/311
Publication status	Published - 2003 Apr

Keywords

Laser interferometry
PODS
Ultra-thin film photodiode

ASJC Scopus subject areas

Instrumentation
Engineering (miscellaneous)
Applied Mathematics

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10.1088/0957-0233/14/4/311

Cite this

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abstract = "The design and fabrication of our compact precision optical displacement sensor (PODS) are based on the newly developed ultra-thin film photodiode with its active layer thinner than a half of the incident light wavelength. In this paper, a detailed description of the principle, design, fabrication process and performance of PODS for application in both smooth and rough surfaces will be given.",

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AU - Li, Yigui

AU - Mi, Xiaoyu

AU - Sasaki, Minoru

AU - Hane, Kazihiro

PY - 2003/4

Y1 - 2003/4

N2 - The design and fabrication of our compact precision optical displacement sensor (PODS) are based on the newly developed ultra-thin film photodiode with its active layer thinner than a half of the incident light wavelength. In this paper, a detailed description of the principle, design, fabrication process and performance of PODS for application in both smooth and rough surfaces will be given.

AB - The design and fabrication of our compact precision optical displacement sensor (PODS) are based on the newly developed ultra-thin film photodiode with its active layer thinner than a half of the incident light wavelength. In this paper, a detailed description of the principle, design, fabrication process and performance of PODS for application in both smooth and rough surfaces will be given.

KW - Laser interferometry

KW - PODS

KW - Ultra-thin film photodiode

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JO - Measurement Science and Technology

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ER -

Precision optical displacement sensor based on ultra-thin film photodiode type optical interferometers

Abstract

Keywords

ASJC Scopus subject areas

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