Abstract
A Sawyer motor-based planar motion stage has good open-loop positioning resolution, rapid acceleration and high speed. When operated in the open-loop mode, however, thrust ripple which mainly due to the cogging force at low moving speed, deteriorates the positioning performance. This paper describes the control strategy of a Sawyer motor-driven XY planar motion stage, in which an effective closed-loop control based on micro-stepping drive is designed. A scheme derived from Sliding Mode Observer (SMO) is used for cogging force compensation. The results of experiment have verified the effectiveness of suggested control strategies and tracking performance of the planar motion stage.
| Original language | English |
|---|---|
| Pages (from-to) | 253-271 |
| Number of pages | 19 |
| Journal | International Journal of Surface Science and Engineering |
| Volume | 3 |
| Issue number | 3 |
| DOIs | |
| Publication status | Published - 2009 |
Keywords
- Motion control
- Precision positioning
- SMO
- Sawyer motor
- Sliding-mode observer
ASJC Scopus subject areas
- Mechanical Engineering
- Surfaces and Interfaces
- Surfaces, Coatings and Films