@article{7abb21861cd14da29690ac57186eff72,
title = "Preface",
author = "Kenji Shiojima and Katsuyoshi Washio and Seiichi Miyazaki and Hiroo Omi",
note = "Funding Information: The conference was hosted by the 154th Committee on Semiconductor Interfaces and Their Application, JSPS, with the 131th Committee on Thin Films, JSPS, supported by Research Institute of Electrical Communication, Tohoku University, and endorsed by The Japan Society of Applied Physics. ",
year = "2021",
month = mar,
day = "1",
doi = "10.1016/j.mssp.2020.105580",
language = "English",
volume = "123",
journal = "Materials Science in Semiconductor Processing",
issn = "1369-8001",
publisher = "Elsevier Limited",
}