TY - GEN
T1 - Preparation and characterization of Bi-perovskite oxide films for piezo applications
AU - Yasui, Shintaro
AU - Naganuma, Hiroshi
AU - Okamura, Soichiro
AU - Iijima, Takashi
AU - Nishida, Ken
AU - Katoda, Takashi
AU - Uchida, Hiroshi
AU - Koda, Seiichiro
AU - Funakubo, Hiroshi
PY - 2007/12/1
Y1 - 2007/12/1
N2 - Thin films of BiFeO3-BiScO3 (BFO-BSO) solid-solution were fabricated for improving electrical resistivity of BiFeO3-based films by replacing electrically-unstable Fe3+ for stable Sc 3+. The films with chemical composition of Bi(Fe1-x, Scx)O3 were fabricated on (111)Pt/TiO2/SiO 2 /(100)Si by chemical solution deposition technique. Single phase of perovskite was obtained in the range of x = 0-0.3, where selective replacement of Fe3+ and Sc3+ was confirmed by Raman measurement. The leakage current density of BFO-BSO film was reduced by increasing x. Well-saturated polarization - electric field hysteresis loop was obtained for BFO-BSO film with x = 0.15.
AB - Thin films of BiFeO3-BiScO3 (BFO-BSO) solid-solution were fabricated for improving electrical resistivity of BiFeO3-based films by replacing electrically-unstable Fe3+ for stable Sc 3+. The films with chemical composition of Bi(Fe1-x, Scx)O3 were fabricated on (111)Pt/TiO2/SiO 2 /(100)Si by chemical solution deposition technique. Single phase of perovskite was obtained in the range of x = 0-0.3, where selective replacement of Fe3+ and Sc3+ was confirmed by Raman measurement. The leakage current density of BFO-BSO film was reduced by increasing x. Well-saturated polarization - electric field hysteresis loop was obtained for BFO-BSO film with x = 0.15.
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U2 - 10.1109/ISAF.2007.4393180
DO - 10.1109/ISAF.2007.4393180
M3 - Conference contribution
AN - SCOPUS:51349127857
SN - 1424413338
SN - 9781424413331
T3 - IEEE International Symposium on Applications of Ferroelectrics
SP - 102
EP - 103
BT - 2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF
T2 - 2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF
Y2 - 27 May 2007 through 31 May 2007
ER -