Preparation and characterization of YBaCuO superconducting films by low-temperature chemical vapor deposition using β-diketonate complex and N2O

Hideaki Zama; Takavuki Miyake; Takeo Hattori; Shunri Oda

Preparation and characterization of YBaCuO superconducting films by low-temperature chemical vapor deposition using β-diketonate complex and N₂O

Hideaki Zama, Takavuki Miyake, Takeo Hattori, Shunri Oda

Research output: Contribution to journal › Article › peer-review

Abstract

Low-temperature growth of YBa₂Cu₃O_x superconducting films by chemical vapor deposition (CVD) has been investigated using dipivaloylmetanato (DPM) chelates of Y, Ba and Cu as starting materials and N₂O as an oxidizing agent. YBa₂Cu₃O_x structure has been prepared at a substrate temperature (T_sub) of 530°C. Superconducting films with superconductive critical temperature (T_c.onset) of 87 K and zero-resistivity critical temperature (T_c.zero) of 15 K have been obtained at T_sub = 610°C and T_c.onset = 89 K, T_c.zero = 83 K at T_sub = 650°C. The relationship between surface morphology, chemical composition and superconductivity is discussed.

Original language	English
Pages (from-to)	3839-3843
Number of pages	5
Journal	Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume	31
Issue number	12 A
Publication status	Published - 1992 Dec

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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Preparation and characterization of YBaCuO superconducting films by low-temperature chemical vapor deposition using β-diketonate complex and N₂O. / Zama, Hideaki; Miyake, Takavuki; Hattori, Takeo et al.

In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, Vol. 31, No. 12 A, 12.1992, p. 3839-3843.

Research output: Contribution to journal › Article › peer-review

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title = "Preparation and characterization of YBaCuO superconducting films by low-temperature chemical vapor deposition using β-diketonate complex and N2O",

abstract = "Low-temperature growth of YBa2Cu3Ox superconducting films by chemical vapor deposition (CVD) has been investigated using dipivaloylmetanato (DPM) chelates of Y, Ba and Cu as starting materials and N2O as an oxidizing agent. YBa2Cu3Ox structure has been prepared at a substrate temperature (Tsub) of 530°C. Superconducting films with superconductive critical temperature (Tc.onset) of 87 K and zero-resistivity critical temperature (Tc.zero) of 15 K have been obtained at Tsub = 610°C and Tc.onset = 89 K, Tc.zero = 83 K at Tsub = 650°C. The relationship between surface morphology, chemical composition and superconductivity is discussed.",

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AU - Oda, Shunri

PY - 1992/12

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N2 - Low-temperature growth of YBa2Cu3Ox superconducting films by chemical vapor deposition (CVD) has been investigated using dipivaloylmetanato (DPM) chelates of Y, Ba and Cu as starting materials and N2O as an oxidizing agent. YBa2Cu3Ox structure has been prepared at a substrate temperature (Tsub) of 530°C. Superconducting films with superconductive critical temperature (Tc.onset) of 87 K and zero-resistivity critical temperature (Tc.zero) of 15 K have been obtained at Tsub = 610°C and Tc.onset = 89 K, Tc.zero = 83 K at Tsub = 650°C. The relationship between surface morphology, chemical composition and superconductivity is discussed.

AB - Low-temperature growth of YBa2Cu3Ox superconducting films by chemical vapor deposition (CVD) has been investigated using dipivaloylmetanato (DPM) chelates of Y, Ba and Cu as starting materials and N2O as an oxidizing agent. YBa2Cu3Ox structure has been prepared at a substrate temperature (Tsub) of 530°C. Superconducting films with superconductive critical temperature (Tc.onset) of 87 K and zero-resistivity critical temperature (Tc.zero) of 15 K have been obtained at Tsub = 610°C and Tc.onset = 89 K, Tc.zero = 83 K at Tsub = 650°C. The relationship between surface morphology, chemical composition and superconductivity is discussed.

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Preparation and characterization of YBaCuO superconducting films by low-temperature chemical vapor deposition using β-diketonate complex and N₂O

Abstract

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