Abstract
We report the preparation of lead magnesium niobate titanate films on a buffered silicon substrate using pulsed laser deposition with double-pulse excitation. A Nd: YAG (355 nm) laser and a KrF (248 nm) excimer laser were combined. The film morphology changed drastically concomitant with the delay time. Suppression of droplets was observed when the Nd:YAG (9.0 × 10 1 J.Cm-2) was used as the first laser and KrF (5.0 × 10-2 J.cm-2) was used as the second laser with a 0.5 μs time delay. The fluence of the second laser was responsible for the resultant phase and when the fluence of KrF is 9.5 ×10-1 J.cm-2, a significant amount of pyrochlore type compounds coexisted.
Original language | English |
---|---|
Pages (from-to) | 657-659 |
Number of pages | 3 |
Journal | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers |
Volume | 46 |
Issue number | 2 |
DOIs | |
Publication status | Published - 2007 Feb 8 |
Externally published | Yes |
Keywords
- Double-pulse excitation
- KrF laser
- Microstructure
- Nd:YAG laser
- PLD
ASJC Scopus subject areas
- Engineering(all)
- Physics and Astronomy(all)