Preparation conditions of CaTiO3 film by metal-organic chemical vapor deposition

Mitsutaka Sato; Rong Tu; Takashi Goto

doi:10.2320/matertrans.47.1386

Preparation conditions of CaTiO³ film by metal-organic chemical vapor deposition

Mitsutaka Sato, Rong Tu, Takashi Goto

IMR - Cooperative Research and Development Center for Advanced Materials

Tohoku University

Research output: Contribution to journal › Article › peer-review

16 Citations (Scopus)

Abstract

Calcium titanate (CaTiO₃) films were prepared by metal-organic chemical vapor deposition (MOCVD) using Ca(dpm)₂ and Ti(O-iPr) ₂(dpm)₂ precursors. The phases, composition and morphology of Ca-Ti-O system films changed depending on molar ratio of Ca to Ti (R _Ca/Ti). total pressure (P_tot) and substrate temperature (T_sub). CaTiO₃ films in a single phase were obtained at the condition of R_Ca/Ti = 0.95, T_sub = 1073 K and P _tot =0.8 kPa, and A_Ca/Ti = 0.78, T_sub = 973 K and P_tot =0.8 kPa. The CaTiO₃ films prepared at T _sub = 1073 K had a welldeveloped columnar texture, and significant (010) orientation was observed at R_Ca/Ti from 0.59 to 0.72. The deposition rate showed the highest value of 1.25 × ^10-8 ms ^-1 at T_sub = 1073 K, P_tot, = 0.4 kPa and R _Ca/Ti = 0.95.

Original language	English
Pages (from-to)	1386-1390
Number of pages	5
Journal	Materials Transactions
Volume	47
Issue number	5
DOIs	https://doi.org/10.2320/matertrans.47.1386
Publication status	Published - 2006 May

Keywords

CaTiO. crystal structure
Deposition rate
Metal-organic chemical vapor deposition
Microstructure

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title = "Preparation conditions of CaTiO3 film by metal-organic chemical vapor deposition",

abstract = "Calcium titanate (CaTiO3) films were prepared by metal-organic chemical vapor deposition (MOCVD) using Ca(dpm)2 and Ti(O-iPr) 2(dpm)2 precursors. The phases, composition and morphology of Ca-Ti-O system films changed depending on molar ratio of Ca to Ti (R Ca/Ti). total pressure (Ptot) and substrate temperature (Tsub). CaTiO3 films in a single phase were obtained at the condition of RCa/Ti = 0.95, Tsub = 1073 K and P tot =0.8 kPa, and ACa/Ti = 0.78, Tsub = 973 K and Ptot =0.8 kPa. The CaTiO3 films prepared at T sub = 1073 K had a welldeveloped columnar texture, and significant (010) orientation was observed at RCa/Ti from 0.59 to 0.72. The deposition rate showed the highest value of 1.25 × 10-8 ms -1 at Tsub = 1073 K, Ptot, = 0.4 kPa and R Ca/Ti = 0.95.",

keywords = "CaTiO. crystal structure, Deposition rate, Metal-organic chemical vapor deposition, Microstructure",

author = "Mitsutaka Sato and Rong Tu and Takashi Goto",

year = "2006",

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doi = "10.2320/matertrans.47.1386",

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T1 - Preparation conditions of CaTiO3 film by metal-organic chemical vapor deposition

AU - Sato, Mitsutaka

AU - Tu, Rong

AU - Goto, Takashi

PY - 2006/5

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N2 - Calcium titanate (CaTiO3) films were prepared by metal-organic chemical vapor deposition (MOCVD) using Ca(dpm)2 and Ti(O-iPr) 2(dpm)2 precursors. The phases, composition and morphology of Ca-Ti-O system films changed depending on molar ratio of Ca to Ti (R Ca/Ti). total pressure (Ptot) and substrate temperature (Tsub). CaTiO3 films in a single phase were obtained at the condition of RCa/Ti = 0.95, Tsub = 1073 K and P tot =0.8 kPa, and ACa/Ti = 0.78, Tsub = 973 K and Ptot =0.8 kPa. The CaTiO3 films prepared at T sub = 1073 K had a welldeveloped columnar texture, and significant (010) orientation was observed at RCa/Ti from 0.59 to 0.72. The deposition rate showed the highest value of 1.25 × 10-8 ms -1 at Tsub = 1073 K, Ptot, = 0.4 kPa and R Ca/Ti = 0.95.

AB - Calcium titanate (CaTiO3) films were prepared by metal-organic chemical vapor deposition (MOCVD) using Ca(dpm)2 and Ti(O-iPr) 2(dpm)2 precursors. The phases, composition and morphology of Ca-Ti-O system films changed depending on molar ratio of Ca to Ti (R Ca/Ti). total pressure (Ptot) and substrate temperature (Tsub). CaTiO3 films in a single phase were obtained at the condition of RCa/Ti = 0.95, Tsub = 1073 K and P tot =0.8 kPa, and ACa/Ti = 0.78, Tsub = 973 K and Ptot =0.8 kPa. The CaTiO3 films prepared at T sub = 1073 K had a welldeveloped columnar texture, and significant (010) orientation was observed at RCa/Ti from 0.59 to 0.72. The deposition rate showed the highest value of 1.25 × 10-8 ms -1 at Tsub = 1073 K, Ptot, = 0.4 kPa and R Ca/Ti = 0.95.

KW - CaTiO. crystal structure

KW - Deposition rate

KW - Metal-organic chemical vapor deposition

KW - Microstructure

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Preparation conditions of CaTiO³ film by metal-organic chemical vapor deposition

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Keywords

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