Preparation of Ag-alloy top-electrode for ferroelectric Pb(Zr, Ti)O 3 films under various atmospheres

Hiroshi Masumoto; Atsushi Kojima; Takashi Iijima; Takashi Goto

doi:10.1143/JJAP.41.6882

Preparation of Ag-alloy top-electrode for ferroelectric Pb(Zr, Ti)O ₃ films under various atmospheres

Hiroshi Masumoto, Atsushi Kojima, Takashi Iijima, Takashi Goto

Advanced Interdisciplinary Research Division

Research output: Contribution to journal › Article › peer-review

5 Citations (Scopus)

Abstract

An Ag-alloy (97Ag-lPd-2Cu in mol%) was proposed as a new top-electrode for Pb(Zr,Ti)O₃ (PZT) films. The effect of annealing temperatur̀e on the ferroelectric performance of PZT films using the Ag-alloy and Pt top-electrodes was investigated in a H₂-containing atmosphere. In the case of the Pt top-electrode, the ferroelectricity of PZT films disappeared after annealing over 300°C. Exfoliations of the Pt bottom-electrode from the substrate were observed after annealing over 300°C. In the case of the Ag-alloy top-electrode, no chemical reaction between the Ag-alloy electrode and PZT film was observed after annealing at 400°C. The ferroelectricity of PZT film was maintained even after annealing at 350°C using the Ag-alloy electrode

Original language	English
Pages (from-to)	6882-6885
Number of pages	4
Journal	Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume	41
Issue number	11 B
DOIs	https://doi.org/10.1143/JJAP.41.6882
Publication status	Published - 2002 Nov

Keywords

Ag-alloy
CSD
Electrode
Hydrogen annealing
PZT film
Pt

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy(all)

Access to Document

10.1143/JJAP.41.6882

Cite this

Preparation of Ag-alloy top-electrode for ferroelectric Pb(Zr, Ti)O ₃ films under various atmospheres. / Masumoto, Hiroshi; Kojima, Atsushi; Iijima, Takashi et al.
In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, Vol. 41, No. 11 B, 11.2002, p. 6882-6885.

Research output: Contribution to journal › Article › peer-review

@article{5fc47280c0974bae829345404f8b9081,

title = "Preparation of Ag-alloy top-electrode for ferroelectric Pb(Zr, Ti)O 3 films under various atmospheres",

abstract = "An Ag-alloy (97Ag-lPd-2Cu in mol%) was proposed as a new top-electrode for Pb(Zr,Ti)O3 (PZT) films. The effect of annealing temperatu{\`r}e on the ferroelectric performance of PZT films using the Ag-alloy and Pt top-electrodes was investigated in a H2-containing atmosphere. In the case of the Pt top-electrode, the ferroelectricity of PZT films disappeared after annealing over 300°C. Exfoliations of the Pt bottom-electrode from the substrate were observed after annealing over 300°C. In the case of the Ag-alloy top-electrode, no chemical reaction between the Ag-alloy electrode and PZT film was observed after annealing at 400°C. The ferroelectricity of PZT film was maintained even after annealing at 350°C using the Ag-alloy electrode",

keywords = "Ag-alloy, CSD, Electrode, Hydrogen annealing, PZT film, Pt",

author = "Hiroshi Masumoto and Atsushi Kojima and Takashi Iijima and Takashi Goto",

year = "2002",

month = nov,

doi = "10.1143/JJAP.41.6882",

language = "English",

volume = "41",

pages = "6882--6885",

journal = "Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes",

issn = "0021-4922",

publisher = "Japan Society of Applied Physics",

number = "11 B",

}

TY - JOUR

T1 - Preparation of Ag-alloy top-electrode for ferroelectric Pb(Zr, Ti)O 3 films under various atmospheres

AU - Masumoto, Hiroshi

AU - Kojima, Atsushi

AU - Iijima, Takashi

AU - Goto, Takashi

PY - 2002/11

Y1 - 2002/11

N2 - An Ag-alloy (97Ag-lPd-2Cu in mol%) was proposed as a new top-electrode for Pb(Zr,Ti)O3 (PZT) films. The effect of annealing temperatur̀e on the ferroelectric performance of PZT films using the Ag-alloy and Pt top-electrodes was investigated in a H2-containing atmosphere. In the case of the Pt top-electrode, the ferroelectricity of PZT films disappeared after annealing over 300°C. Exfoliations of the Pt bottom-electrode from the substrate were observed after annealing over 300°C. In the case of the Ag-alloy top-electrode, no chemical reaction between the Ag-alloy electrode and PZT film was observed after annealing at 400°C. The ferroelectricity of PZT film was maintained even after annealing at 350°C using the Ag-alloy electrode

AB - An Ag-alloy (97Ag-lPd-2Cu in mol%) was proposed as a new top-electrode for Pb(Zr,Ti)O3 (PZT) films. The effect of annealing temperatur̀e on the ferroelectric performance of PZT films using the Ag-alloy and Pt top-electrodes was investigated in a H2-containing atmosphere. In the case of the Pt top-electrode, the ferroelectricity of PZT films disappeared after annealing over 300°C. Exfoliations of the Pt bottom-electrode from the substrate were observed after annealing over 300°C. In the case of the Ag-alloy top-electrode, no chemical reaction between the Ag-alloy electrode and PZT film was observed after annealing at 400°C. The ferroelectricity of PZT film was maintained even after annealing at 350°C using the Ag-alloy electrode

KW - Ag-alloy

KW - CSD

KW - Electrode

KW - Hydrogen annealing

KW - PZT film

KW - Pt

UR - http://www.scopus.com/inward/record.url?scp=32444435385&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=32444435385&partnerID=8YFLogxK

U2 - 10.1143/JJAP.41.6882

DO - 10.1143/JJAP.41.6882

M3 - Article

AN - SCOPUS:32444435385

SN - 0021-4922

VL - 41

SP - 6882

EP - 6885

JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

IS - 11 B

ER -