Preparation of amorphous lithium ion conductor thin films by pulsed laser deposition

Junichi Kawamura, Naoaki Kuwata, Keisuke Toribami, Noriko Sata, Osamu Kamishima, Takeshi Hattori

Research output: Contribution to journalConference articlepeer-review

50 Citations (Scopus)


Amorphous lithium ion conductor films were prepared by pulsed laser deposition (PLD). The morphology of the films was dependent on the preparation conditions, especially the optical absorbance of the target materials. A good amorphous thin film was obtained for the nominal composition of 0.6(Li 4SiO4)-0.4(Li3VO4). The film was characterized through X-ray, FT-IR, Raman, a field emission scanning electron microscope (FE-SEM), an atomic force microscope (AFM) and an inducting coupled plasma (ICP). The ionic conductivity of the film was 10-7 S/cm at room temperature, which is one order smaller than the previously reported value of a partially crystallized RF-sputtered film.

Original languageEnglish
Pages (from-to)273-276
Number of pages4
JournalSolid State Ionics
Issue number1-4
Publication statusPublished - 2004 Nov 30
EventFourteenth International Conference on Solid State Ionics - Monterey, CA., United States
Duration: 2003 Jun 222003 Jun 27


  • Amorphous
  • Glassy electrolyte
  • Pulsed laser deposition
  • Thin film lithium battery


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