Preparation of amorphous lithium ion conductor thin films by pulsed laser deposition

Junichi Kawamura; Naoaki Kuwata; Keisuke Toribami; Noriko Sata; Osamu Kamishima; Takeshi Hattori

doi:10.1016/j.ssi.2004.05.034

Preparation of amorphous lithium ion conductor thin films by pulsed laser deposition

Junichi Kawamura, Naoaki Kuwata, Keisuke Toribami, Noriko Sata, Osamu Kamishima, Takeshi Hattori

NanoTerasu Co-Creation Promotion Division

Tohoku University

Research output: Contribution to journal › Conference article › peer-review

50 Citations (Scopus)

Abstract

Amorphous lithium ion conductor films were prepared by pulsed laser deposition (PLD). The morphology of the films was dependent on the preparation conditions, especially the optical absorbance of the target materials. A good amorphous thin film was obtained for the nominal composition of 0.6(Li ₄SiO₄)-0.4(Li₃VO₄). The film was characterized through X-ray, FT-IR, Raman, a field emission scanning electron microscope (FE-SEM), an atomic force microscope (AFM) and an inducting coupled plasma (ICP). The ionic conductivity of the film was 10^-7 S/cm at room temperature, which is one order smaller than the previously reported value of a partially crystallized RF-sputtered film.

Original language	English
Pages (from-to)	273-276
Number of pages	4
Journal	Solid State Ionics
Volume	175
Issue number	1-4
DOIs	https://doi.org/10.1016/j.ssi.2004.05.034
Publication status	Published - 2004 Nov 30
Event	Fourteenth International Conference on Solid State Ionics - Monterey, CA., United States Duration: 2003 Jun 22 → 2003 Jun 27

Keywords

Amorphous
Glassy electrolyte
Pulsed laser deposition
Thin film lithium battery

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10.1016/j.ssi.2004.05.034

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title = "Preparation of amorphous lithium ion conductor thin films by pulsed laser deposition",

abstract = "Amorphous lithium ion conductor films were prepared by pulsed laser deposition (PLD). The morphology of the films was dependent on the preparation conditions, especially the optical absorbance of the target materials. A good amorphous thin film was obtained for the nominal composition of 0.6(Li 4SiO4)-0.4(Li3VO4). The film was characterized through X-ray, FT-IR, Raman, a field emission scanning electron microscope (FE-SEM), an atomic force microscope (AFM) and an inducting coupled plasma (ICP). The ionic conductivity of the film was 10-7 S/cm at room temperature, which is one order smaller than the previously reported value of a partially crystallized RF-sputtered film.",

keywords = "Amorphous, Glassy electrolyte, Pulsed laser deposition, Thin film lithium battery",

author = "Junichi Kawamura and Naoaki Kuwata and Keisuke Toribami and Noriko Sata and Osamu Kamishima and Takeshi Hattori",

note = "Funding Information: Author would like to thank to Dr. H. Ohtsuka NTT Japan for his helpful discussions. This work was partly supported by the Grant-in-Aid of the Ministry of Education, Culture, Sports, Science and Technology of Japan.; Fourteenth International Conference on Solid State Ionics ; Conference date: 22-06-2003 Through 27-06-2003",

year = "2004",

month = nov,

day = "30",

doi = "10.1016/j.ssi.2004.05.034",

language = "English",

volume = "175",

pages = "273--276",

journal = "Solid State Ionics",

issn = "0167-2738",

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TY - JOUR

T1 - Preparation of amorphous lithium ion conductor thin films by pulsed laser deposition

AU - Kawamura, Junichi

AU - Kuwata, Naoaki

AU - Toribami, Keisuke

AU - Sata, Noriko

AU - Kamishima, Osamu

AU - Hattori, Takeshi

N1 - Funding Information: Author would like to thank to Dr. H. Ohtsuka NTT Japan for his helpful discussions. This work was partly supported by the Grant-in-Aid of the Ministry of Education, Culture, Sports, Science and Technology of Japan.

PY - 2004/11/30

Y1 - 2004/11/30

N2 - Amorphous lithium ion conductor films were prepared by pulsed laser deposition (PLD). The morphology of the films was dependent on the preparation conditions, especially the optical absorbance of the target materials. A good amorphous thin film was obtained for the nominal composition of 0.6(Li 4SiO4)-0.4(Li3VO4). The film was characterized through X-ray, FT-IR, Raman, a field emission scanning electron microscope (FE-SEM), an atomic force microscope (AFM) and an inducting coupled plasma (ICP). The ionic conductivity of the film was 10-7 S/cm at room temperature, which is one order smaller than the previously reported value of a partially crystallized RF-sputtered film.

AB - Amorphous lithium ion conductor films were prepared by pulsed laser deposition (PLD). The morphology of the films was dependent on the preparation conditions, especially the optical absorbance of the target materials. A good amorphous thin film was obtained for the nominal composition of 0.6(Li 4SiO4)-0.4(Li3VO4). The film was characterized through X-ray, FT-IR, Raman, a field emission scanning electron microscope (FE-SEM), an atomic force microscope (AFM) and an inducting coupled plasma (ICP). The ionic conductivity of the film was 10-7 S/cm at room temperature, which is one order smaller than the previously reported value of a partially crystallized RF-sputtered film.

KW - Amorphous

KW - Glassy electrolyte

KW - Pulsed laser deposition

KW - Thin film lithium battery

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U2 - 10.1016/j.ssi.2004.05.034

DO - 10.1016/j.ssi.2004.05.034

M3 - Conference article

AN - SCOPUS:10144224959

SN - 0167-2738

VL - 175

SP - 273

EP - 276

JO - Solid State Ionics

JF - Solid State Ionics

IS - 1-4

T2 - Fourteenth International Conference on Solid State Ionics

Y2 - 22 June 2003 through 27 June 2003

ER -

Preparation of amorphous lithium ion conductor thin films by pulsed laser deposition

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Keywords

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