Abstract
Thin films of BaTiO3 were prepared by CVD using barium β-diketonate chelate {Ba(C11H19O2)2} and titanium tetraisopropoxide {Ti[OCH(CH3)2]4} as precursors. BaTiO3 films deposited from 700° to 1000°C on MgO(100) substrates showed prominent a-axis orientation. X-ray pole figure measurement by Schulz's reflected method indicated that the CVD-BaTiO3 films deposited from 900° to 1000°C grew epitaxially on MgO(100) substrates. SEM observation showed that rectangular grains aligned two dimensionally in the plane of the films deposited at 1000°C.
| Original language | English |
|---|---|
| Pages (from-to) | 514-516 |
| Number of pages | 3 |
| Journal | Journal of the Ceramic Society of Japan. International ed. |
| Volume | 99 |
| Issue number | 6 |
| Publication status | Published - 1991 Jun |