Preparation of BaTiO3 films by CVD

Hidenobu Nakazawa, Hisanori Yamane, Toshio Hirai

Research output: Contribution to journalArticlepeer-review


Thin films of BaTiO3 were prepared by CVD using barium β-diketonate chelate {Ba(C11H19O2)2} and titanium tetraisopropoxide {Ti[OCH(CH3)2]4} as precursors. BaTiO3 films deposited from 700° to 1000°C on MgO(100) substrates showed prominent a-axis orientation. X-ray pole figure measurement by Schulz's reflected method indicated that the CVD-BaTiO3 films deposited from 900° to 1000°C grew epitaxially on MgO(100) substrates. SEM observation showed that rectangular grains aligned two dimensionally in the plane of the films deposited at 1000°C.

Original languageEnglish
Pages (from-to)514-516
Number of pages3
JournalJournal of the Ceramic Society of Japan. International ed.
Issue number6
Publication statusPublished - 1991 Jun


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