Preparation of Ca-Ti-O/Ca-P-O functionally graded bio-ceramic film by MOCVD

Mitsutaka Sato; Rong Tu; Takashi Goto; Kyosuke Ueda; Takayuki Narushima

doi:10.2497/jjspm.55.325

Preparation of Ca-Ti-O/Ca-P-O functionally graded bio-ceramic film by MOCVD

Mitsutaka Sato, Rong Tu, Takashi Goto, Kyosuke Ueda, Takayuki Narushima

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Abstract

Ca-Ti-O and Ca-P-O films were prepared by MOCVD. The phases, composition and morphology of Ca-Ti-O and Ca-P-O films changed depending on the molar ratio of Ca to Ti (R_Ca/Ti) and Ca to P (R_Ca/P) precursors, total pressure (P_tot) and substrate temperature (T_sub). CaTiO₃ films in a single phase were obtained at T_sub=973 and 1073 K. CaTiO₃ films prepared at T_sub= 873 K had a dense and smooth surface. CaTiO₃ films prepared at T_sub= 1073 K had complicated rough surface with a cauliflower-like texture. α-TCP and HAp films in a single phase were obtained at T_sub, = 973 and 1073 K, and both films had dense microstructure. Apatite formed after 3 days on the CaTiO₃ film, while 14 days on the a-TCP film and 6 hours on the HAp film, respectively. Functionally graded Ca-Ti-O/Ca-P-O films were successfully prepared by MOCVD, and expected to have good bone conductivity and adherence to Ti substrate.

Original language	English
Pages (from-to)	325-330
Number of pages	6
Journal	Funtai Oyobi Fummatsu Yakin/Journal of the Japan Society of Powder and Powder Metallurgy
Volume	55
Issue number	5
DOIs	https://doi.org/10.2497/jjspm.55.325
Publication status	Published - 2008 May

Keywords

CaTiO
HAp
Hanks' solution
Metal-organic chemical vapor deposition
α-TCP

ASJC Scopus subject areas

Mechanical Engineering
Industrial and Manufacturing Engineering
Metals and Alloys
Materials Chemistry

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10.2497/jjspm.55.325

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title = "Preparation of Ca-Ti-O/Ca-P-O functionally graded bio-ceramic film by MOCVD",

abstract = "Ca-Ti-O and Ca-P-O films were prepared by MOCVD. The phases, composition and morphology of Ca-Ti-O and Ca-P-O films changed depending on the molar ratio of Ca to Ti (RCa/Ti) and Ca to P (RCa/P) precursors, total pressure (Ptot) and substrate temperature (Tsub). CaTiO3 films in a single phase were obtained at Tsub=973 and 1073 K. CaTiO3 films prepared at Tsub= 873 K had a dense and smooth surface. CaTiO3 films prepared at Tsub= 1073 K had complicated rough surface with a cauliflower-like texture. α-TCP and HAp films in a single phase were obtained at Tsub, = 973 and 1073 K, and both films had dense microstructure. Apatite formed after 3 days on the CaTiO3 film, while 14 days on the a-TCP film and 6 hours on the HAp film, respectively. Functionally graded Ca-Ti-O/Ca-P-O films were successfully prepared by MOCVD, and expected to have good bone conductivity and adherence to Ti substrate.",

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author = "Mitsutaka Sato and Rong Tu and Takashi Goto and Kyosuke Ueda and Takayuki Narushima",

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AU - Sato, Mitsutaka

AU - Tu, Rong

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AU - Ueda, Kyosuke

AU - Narushima, Takayuki

PY - 2008/5

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N2 - Ca-Ti-O and Ca-P-O films were prepared by MOCVD. The phases, composition and morphology of Ca-Ti-O and Ca-P-O films changed depending on the molar ratio of Ca to Ti (RCa/Ti) and Ca to P (RCa/P) precursors, total pressure (Ptot) and substrate temperature (Tsub). CaTiO3 films in a single phase were obtained at Tsub=973 and 1073 K. CaTiO3 films prepared at Tsub= 873 K had a dense and smooth surface. CaTiO3 films prepared at Tsub= 1073 K had complicated rough surface with a cauliflower-like texture. α-TCP and HAp films in a single phase were obtained at Tsub, = 973 and 1073 K, and both films had dense microstructure. Apatite formed after 3 days on the CaTiO3 film, while 14 days on the a-TCP film and 6 hours on the HAp film, respectively. Functionally graded Ca-Ti-O/Ca-P-O films were successfully prepared by MOCVD, and expected to have good bone conductivity and adherence to Ti substrate.

AB - Ca-Ti-O and Ca-P-O films were prepared by MOCVD. The phases, composition and morphology of Ca-Ti-O and Ca-P-O films changed depending on the molar ratio of Ca to Ti (RCa/Ti) and Ca to P (RCa/P) precursors, total pressure (Ptot) and substrate temperature (Tsub). CaTiO3 films in a single phase were obtained at Tsub=973 and 1073 K. CaTiO3 films prepared at Tsub= 873 K had a dense and smooth surface. CaTiO3 films prepared at Tsub= 1073 K had complicated rough surface with a cauliflower-like texture. α-TCP and HAp films in a single phase were obtained at Tsub, = 973 and 1073 K, and both films had dense microstructure. Apatite formed after 3 days on the CaTiO3 film, while 14 days on the a-TCP film and 6 hours on the HAp film, respectively. Functionally graded Ca-Ti-O/Ca-P-O films were successfully prepared by MOCVD, and expected to have good bone conductivity and adherence to Ti substrate.

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Preparation of Ca-Ti-O/Ca-P-O functionally graded bio-ceramic film by MOCVD

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Keywords

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