Preparation of Cd1-xYxSb2O6 thin film on glass substrate by radio frequency sputtering

Kazuhiko Yanagawa; Yoshimichi Ohki; Takahisa Omata; Hideo Hosono; Naoyuki Ueda; Hiroshi Kawazoe

doi:10.1063/1.112316

Preparation of Cd_1-xY_xSb₂O₆ thin film on glass substrate by radio frequency sputtering

Kazuhiko Yanagawa, Yoshimichi Ohki, Takahisa Omata, Hideo Hosono, Naoyuki Ueda, Hiroshi Kawazoe

IMRAM - Center for Mineral Processing and Metallurgy (CMPM)

Research output: Contribution to journal › Article › peer-review

40 Citations (Scopus)

Abstract

Cd_1-xY_xSb₂O₆ thin films were deposited onto a silica glass substrate by rf sputtering method. The highest conductivity observed for Cd_0.95Y_0.05Sb₂O ₆ thin films was 4.1×10 S cm^-1, with a carrier concentration of 1.3×10²⁰ cm^-3 and a Hall mobility of 1.9 cm² V^-1S ^-1. No distinct optical absorption band was observed from the visible to the infrared region. These observations show that Cd_1-xY_xSb₂O₆ thin films have characteristics of a transparent conductor, whose transparent wavelength region covers the near infrared.

Original language	English
Pages (from-to)	406-408
Number of pages	3
Journal	Applied Physics Letters
Volume	65
Issue number	4
DOIs	https://doi.org/10.1063/1.112316
Publication status	Published - 1994

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abstract = "Cd1-xYxSb2O6 thin films were deposited onto a silica glass substrate by rf sputtering method. The highest conductivity observed for Cd0.95Y0.05Sb2O 6 thin films was 4.1×10 S cm-1, with a carrier concentration of 1.3×1020 cm-3 and a Hall mobility of 1.9 cm2 V-1S -1. No distinct optical absorption band was observed from the visible to the infrared region. These observations show that Cd1-xYxSb2O6 thin films have characteristics of a transparent conductor, whose transparent wavelength region covers the near infrared.",

author = "Kazuhiko Yanagawa and Yoshimichi Ohki and Takahisa Omata and Hideo Hosono and Naoyuki Ueda and Hiroshi Kawazoe",

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T1 - Preparation of Cd1-xYxSb2O6 thin film on glass substrate by radio frequency sputtering

AU - Yanagawa, Kazuhiko

AU - Ohki, Yoshimichi

AU - Omata, Takahisa

AU - Hosono, Hideo

AU - Ueda, Naoyuki

AU - Kawazoe, Hiroshi

PY - 1994

Y1 - 1994

N2 - Cd1-xYxSb2O6 thin films were deposited onto a silica glass substrate by rf sputtering method. The highest conductivity observed for Cd0.95Y0.05Sb2O 6 thin films was 4.1×10 S cm-1, with a carrier concentration of 1.3×1020 cm-3 and a Hall mobility of 1.9 cm2 V-1S -1. No distinct optical absorption band was observed from the visible to the infrared region. These observations show that Cd1-xYxSb2O6 thin films have characteristics of a transparent conductor, whose transparent wavelength region covers the near infrared.

AB - Cd1-xYxSb2O6 thin films were deposited onto a silica glass substrate by rf sputtering method. The highest conductivity observed for Cd0.95Y0.05Sb2O 6 thin films was 4.1×10 S cm-1, with a carrier concentration of 1.3×1020 cm-3 and a Hall mobility of 1.9 cm2 V-1S -1. No distinct optical absorption band was observed from the visible to the infrared region. These observations show that Cd1-xYxSb2O6 thin films have characteristics of a transparent conductor, whose transparent wavelength region covers the near infrared.

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Preparation of Cd_1-xY_xSb₂O₆ thin film on glass substrate by radio frequency sputtering

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