TY - GEN
T1 - Preparation of functionally graded bio-ceramic film by MOCVD
AU - Sato, Mitsutaka
AU - Tu, Rong
AU - Goto, Takashi
AU - Ueda, Kyosuke
AU - Narushima, Takayuki
PY - 2010
Y1 - 2010
N2 - Functionally graded Ca-Ti-O/Ca-P-O films were prepared by MOCVD. The phases, composition and morphology of Ca-Ti-O and Ca-P-O films changed depending on the molar ratio of each precursors, total pressure (Ptot) and substrate temperature (Tsub). CaTiO3 films in a single phase were obtained at Tsub = 973 and 1073 K. CaTiO3 films prepared at 873 K had a dense and smooth surface, whereas that prepared at Tsub = 1073 K had complicated rough surface with a cauliflower-like texture. The graded texture of CaTiO3 films from columnar to fine grains was advantageous to good adherence for metal substrates. α-TCP and HAp films in a single phase were obtained at Tsub = 973 and 1073 K. Both α-TCP and HAp films had a dense and smooth surface. The maximum deposition rate of Ca-Ti-O and Ca-P-O films were 44 and 20 μm/h, respectively, and several 10 times grater than that of sputtering method. Apatite formation rate strongly depended on the surface morphology of film. Apatite formed after 3 days on the CaTiO3 film, 14 days on the α-TCP film and 6 hours on the HAp film in a Hanks' solution.
AB - Functionally graded Ca-Ti-O/Ca-P-O films were prepared by MOCVD. The phases, composition and morphology of Ca-Ti-O and Ca-P-O films changed depending on the molar ratio of each precursors, total pressure (Ptot) and substrate temperature (Tsub). CaTiO3 films in a single phase were obtained at Tsub = 973 and 1073 K. CaTiO3 films prepared at 873 K had a dense and smooth surface, whereas that prepared at Tsub = 1073 K had complicated rough surface with a cauliflower-like texture. The graded texture of CaTiO3 films from columnar to fine grains was advantageous to good adherence for metal substrates. α-TCP and HAp films in a single phase were obtained at Tsub = 973 and 1073 K. Both α-TCP and HAp films had a dense and smooth surface. The maximum deposition rate of Ca-Ti-O and Ca-P-O films were 44 and 20 μm/h, respectively, and several 10 times grater than that of sputtering method. Apatite formation rate strongly depended on the surface morphology of film. Apatite formed after 3 days on the CaTiO3 film, 14 days on the α-TCP film and 6 hours on the HAp film in a Hanks' solution.
KW - Calcium titanate
KW - Hydroxyapatite
KW - Metal organic chemical vapor deposition
KW - α-tricalcium phosphate
UR - http://www.scopus.com/inward/record.url?scp=75849150183&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=75849150183&partnerID=8YFLogxK
U2 - 10.4028/www.scientific.net/MSF.631-632.193
DO - 10.4028/www.scientific.net/MSF.631-632.193
M3 - Conference contribution
AN - SCOPUS:75849150183
SN - 0878493077
SN - 9780878493074
T3 - Materials Science Forum
SP - 193
EP - 198
BT - Multiscale, Multifunctional and Functionally Graded Materials
PB - Trans Tech Publications Ltd
T2 - 10th International Symposium on Multiscale, Multifunctional and Functionally Graded Materials, MM and FGMs
Y2 - 22 September 2008 through 25 September 2008
ER -