Preparation of hydroxyapatite and calcium phosphate films by MOCVD

Mitsutaka Sato, Rong Tu, Takashi Goto

Research output: Contribution to journalArticlepeer-review

21 Citations (Scopus)


Ca-P-O films were prepared by MOCVD using Ca(dpm)2 and (C 6H5O)3PO precursors. The crystal phase changed with changing deposition conditions of substrate temperature (Tsub), total pressure (Ptot) and molar ratio of Ca and P precursors (R Ca/P). α-tricalcium phosphate (γ-Ca3(PO 4)2) in a single phase was obtained at Ysub = 973K, RCa/P < 0.3 and Tsub = 1073K, RCa/P = 0.1 to 0.5. Hydroxyapatite (Ca10(PO4)6(OH) 2) in a single phase was first prepared by MOCVD at Tsub = 973 K, RCa/P = 0.5 and Tsub = 1073 K, RCa/P = 0.8 to 1. The maximum deposition rate of α-TCP and HAp films in a single phase were 6.0 and 4.0nms-1 at Pwt = 0.8 kPa and T sub = 1073 K, respectively.

Original languageEnglish
Pages (from-to)3149-3153
Number of pages5
JournalMaterials Transactions
Issue number12
Publication statusPublished - 2007 Dec


  • Crystal structure
  • Deposition rate
  • Metal-organic chemical vapor deposition, calcium phosphate
  • Microstructure


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