Preparation of Magnéli phases of Ti27O52 and Ti6O11 films by laser chemical vapor deposition

Rong Tu; Guangsheng Huo; Teiichi Kimura; Takashi Goto

doi:10.1016/j.tsf.2010.07.050

Preparation of Magnéli phases of Ti₂₇O₅₂ and Ti₆O₁₁ films by laser chemical vapor deposition

Rong Tu, Guangsheng Huo, Teiichi Kimura, Takashi Goto

Materials Processing and Characterization Division

Research output: Contribution to journal › Article › peer-review

19 Citations (Scopus)

Abstract

Magnéli phases of Ti₂₇O₅₂ and Ti ₆O₁₁ films were prepared by laser chemical vapor deposition using Ti(dpm)₂(O-i-Pr)₂ as a precursor. Ti ₆O₁₁ film was obtained at a laser power (P_L) of 200 W and a deposition temperature (T_dep) of 1270 K. Ti ₂₇O₅₂ film was obtained at P_L = 150 to 200 W and T_dep = 1120 to 1250 K. Ti₆O₁₁ and Ti ₂₇O₅₂ films had a faceted texture about 2 μm in grain size and a columnar cross section. The deposition rate of Ti₂₇O ₅₂ and Ti₆O₁₁ films were 90 and 70 μm h ^{- 1}, respectively.

Original language	English
Pages (from-to)	6927-6932
Number of pages	6
Journal	Thin Solid Films
Volume	518
Issue number	23
DOIs	https://doi.org/10.1016/j.tsf.2010.07.050
Publication status	Published - 2010 Sept 30

Keywords

Laser chemical vapor deposition
Magnéli phase
Titanium oxide
Transmission electron microscopy
X-ray diffraction

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Surfaces and Interfaces
Surfaces, Coatings and Films
Metals and Alloys
Materials Chemistry

Access to Document

10.1016/j.tsf.2010.07.050

Cite this

@article{2a34d22bba13422f82981222bfbf70a5,

title = "Preparation of Magn{\'e}li phases of Ti27O52 and Ti6O11 films by laser chemical vapor deposition",

abstract = "Magn{\'e}li phases of Ti27O52 and Ti 6O11 films were prepared by laser chemical vapor deposition using Ti(dpm)2(O-i-Pr)2 as a precursor. Ti 6O11 film was obtained at a laser power (PL) of 200 W and a deposition temperature (Tdep) of 1270 K. Ti 27O52 film was obtained at PL = 150 to 200 W and Tdep = 1120 to 1250 K. Ti6O11 and Ti 27O52 films had a faceted texture about 2 μm in grain size and a columnar cross section. The deposition rate of Ti27O 52 and Ti6O11 films were 90 and 70 μm h - 1, respectively.",

keywords = "Laser chemical vapor deposition, Magn{\'e}li phase, Titanium oxide, Transmission electron microscopy, X-ray diffraction",

author = "Rong Tu and Guangsheng Huo and Teiichi Kimura and Takashi Goto",

note = "Funding Information: This research was financially supported by the Rare Metal Substitute Materials Development Project, New Energy and Industry Technology Development Organization (NEDO) , by the Global COE Program “Materials Integration (International Center of Education and Research), Tohoku University” , and by the International Collaboration Center, ICC-IMR, Tohoku University . Copyright: Copyright 2011 Elsevier B.V., All rights reserved.",

year = "2010",

month = sep,

day = "30",

doi = "10.1016/j.tsf.2010.07.050",

language = "English",

volume = "518",

pages = "6927--6932",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier",

number = "23",

}

TY - JOUR

T1 - Preparation of Magnéli phases of Ti27O52 and Ti6O11 films by laser chemical vapor deposition

AU - Tu, Rong

AU - Huo, Guangsheng

AU - Kimura, Teiichi

AU - Goto, Takashi

N1 - Funding Information: This research was financially supported by the Rare Metal Substitute Materials Development Project, New Energy and Industry Technology Development Organization (NEDO) , by the Global COE Program “Materials Integration (International Center of Education and Research), Tohoku University” , and by the International Collaboration Center, ICC-IMR, Tohoku University . Copyright: Copyright 2011 Elsevier B.V., All rights reserved.

PY - 2010/9/30

Y1 - 2010/9/30

N2 - Magnéli phases of Ti27O52 and Ti 6O11 films were prepared by laser chemical vapor deposition using Ti(dpm)2(O-i-Pr)2 as a precursor. Ti 6O11 film was obtained at a laser power (PL) of 200 W and a deposition temperature (Tdep) of 1270 K. Ti 27O52 film was obtained at PL = 150 to 200 W and Tdep = 1120 to 1250 K. Ti6O11 and Ti 27O52 films had a faceted texture about 2 μm in grain size and a columnar cross section. The deposition rate of Ti27O 52 and Ti6O11 films were 90 and 70 μm h - 1, respectively.

AB - Magnéli phases of Ti27O52 and Ti 6O11 films were prepared by laser chemical vapor deposition using Ti(dpm)2(O-i-Pr)2 as a precursor. Ti 6O11 film was obtained at a laser power (PL) of 200 W and a deposition temperature (Tdep) of 1270 K. Ti 27O52 film was obtained at PL = 150 to 200 W and Tdep = 1120 to 1250 K. Ti6O11 and Ti 27O52 films had a faceted texture about 2 μm in grain size and a columnar cross section. The deposition rate of Ti27O 52 and Ti6O11 films were 90 and 70 μm h - 1, respectively.

KW - Laser chemical vapor deposition

KW - Magnéli phase

KW - Titanium oxide

KW - Transmission electron microscopy

KW - X-ray diffraction

UR - http://www.scopus.com/inward/record.url?scp=77956231480&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=77956231480&partnerID=8YFLogxK

U2 - 10.1016/j.tsf.2010.07.050

DO - 10.1016/j.tsf.2010.07.050

M3 - Article

AN - SCOPUS:77956231480

SN - 0040-6090

VL - 518

SP - 6927

EP - 6932

JO - Thin Solid Films

JF - Thin Solid Films

IS - 23

ER -