Preparation of RuO2-YSZ nano-composite films by MOCVD

Teiichi Kimura, Takashi Goto

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)


RuO2-yttrium stabilized zirconia (YSZ) nano-composite films were prepared by MOCVD on YSZ substrates and their electrical properties were investigated by AC impedance spectroscopy. The composite films consisted of RuO2 and YSZ particles both several tens of nanometer in diameter. The electrical conductivity at the RuO2- YSZ interface increased with increasing RuO2 content up to 20-25 vol.% RuO2 and became constant at more than 30 vol.% RuO2. The emf values of the oxygen concentration cell constructed from the RuO2 film electrode and YSZ electrolyte showed the Nernstian theoretical values at 650 °C.

Original languageEnglish
Pages (from-to)240-244
Number of pages5
JournalSurface and Coatings Technology
Issue number2-3
Publication statusPublished - 2003 Apr 22


  • Composite film
  • Electrode materials
  • Oxygen sensors

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry


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