Preparation of RuO2-YSZ nano-composite films by MOCVD

Teiichi Kimura; Takashi Goto

doi:10.1016/S0257-8972(02)00913-1

Preparation of RuO₂-YSZ nano-composite films by MOCVD

Teiichi Kimura, Takashi Goto

Materials Processing and Characterization Division

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Abstract

RuO₂-yttrium stabilized zirconia (YSZ) nano-composite films were prepared by MOCVD on YSZ substrates and their electrical properties were investigated by AC impedance spectroscopy. The composite films consisted of RuO₂ and YSZ particles both several tens of nanometer in diameter. The electrical conductivity at the RuO₂- YSZ interface increased with increasing RuO₂ content up to 20-25 vol.% RuO₂ and became constant at more than 30 vol.% RuO₂. The emf values of the oxygen concentration cell constructed from the RuO₂ film electrode and YSZ electrolyte showed the Nernstian theoretical values at 650 °C.

Original language	English
Pages (from-to)	240-244
Number of pages	5
Journal	Surface and Coatings Technology
Volume	167
Issue number	2-3
DOIs	https://doi.org/10.1016/S0257-8972(02)00913-1
Publication status	Published - 2003 Apr 22

Keywords

Composite film
Electrode materials
MOCVD
Oxygen sensors

ASJC Scopus subject areas

Chemistry(all)
Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films
Materials Chemistry

Access to Document

10.1016/S0257-8972(02)00913-1

Cite this

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title = "Preparation of RuO2-YSZ nano-composite films by MOCVD",

abstract = "RuO2-yttrium stabilized zirconia (YSZ) nano-composite films were prepared by MOCVD on YSZ substrates and their electrical properties were investigated by AC impedance spectroscopy. The composite films consisted of RuO2 and YSZ particles both several tens of nanometer in diameter. The electrical conductivity at the RuO2- YSZ interface increased with increasing RuO2 content up to 20-25 vol.% RuO2 and became constant at more than 30 vol.% RuO2. The emf values of the oxygen concentration cell constructed from the RuO2 film electrode and YSZ electrolyte showed the Nernstian theoretical values at 650 °C.",

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T1 - Preparation of RuO2-YSZ nano-composite films by MOCVD

AU - Kimura, Teiichi

AU - Goto, Takashi

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N2 - RuO2-yttrium stabilized zirconia (YSZ) nano-composite films were prepared by MOCVD on YSZ substrates and their electrical properties were investigated by AC impedance spectroscopy. The composite films consisted of RuO2 and YSZ particles both several tens of nanometer in diameter. The electrical conductivity at the RuO2- YSZ interface increased with increasing RuO2 content up to 20-25 vol.% RuO2 and became constant at more than 30 vol.% RuO2. The emf values of the oxygen concentration cell constructed from the RuO2 film electrode and YSZ electrolyte showed the Nernstian theoretical values at 650 °C.

AB - RuO2-yttrium stabilized zirconia (YSZ) nano-composite films were prepared by MOCVD on YSZ substrates and their electrical properties were investigated by AC impedance spectroscopy. The composite films consisted of RuO2 and YSZ particles both several tens of nanometer in diameter. The electrical conductivity at the RuO2- YSZ interface increased with increasing RuO2 content up to 20-25 vol.% RuO2 and became constant at more than 30 vol.% RuO2. The emf values of the oxygen concentration cell constructed from the RuO2 film electrode and YSZ electrolyte showed the Nernstian theoretical values at 650 °C.

KW - Composite film

KW - Electrode materials

KW - MOCVD

KW - Oxygen sensors

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