Preparation of YBCO Superconducting Nano-Composite Films by MOCVD

Hisanori Yamane, Hideyuki Kurosawa, Toshio Hirai

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1 Citation (Scopus)


Y-Ba-Cu-0 (YBCO) superconducting films were prepared on SrTiO3(100) substrates by metalorganic chemical vapor deposition. The precursors used were β-diketone chelates of Y, Ba and Cu. The YBCO films, having superconducting transition temperature defined by zero resistivity (Tc(R=0)) above 90 K and critical current density (Jc) over 106 A/cm2 at 77 K and 0 T, were obtained at the conditions of oxygen partial pressure (Poj) and deposition temperature (Tdep) near the CuO-Cu2O-O2equilibrium line (PO2=3.6 Torr-Tdep= 850°0 and PO2=0.036 Torr - Tdep=700-720°C). The films prepared at these conditions showed Jc over 104 A/cm2 at 77 K in high magnetic fields above 20 T. The nano-composite structure of the YBCO films was studied by transmission electron microscopy. CuO and Y2Cu205 grains with a size of 0.1-2 µm were included. The precipitates of about 10 nm in size were observed in the matrix of the YBCO films.

Original languageEnglish
Pages (from-to)370-376
Number of pages7
JournalFuntai Oyobi Fummatsu Yakin/Journal of the Japan Society of Powder and Powder Metallurgy
Issue number4
Publication statusPublished - 1994 Feb 1


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