TY - JOUR
T1 - Preparation of ZnO thin films by MO-CVD using fibrous bis (acetylacetonato) zinc (II) and ozone
AU - Haga, K.
AU - Abe, S.
AU - Takizawa, Y.
AU - Yubuta, K.
AU - Shishido, T.
PY - 2013
Y1 - 2013
N2 - The fibrous bis (acetylacetonato) zinc (II) (Zn(C5H 7O2)2·xH2O) was prepared with novel apparatus involved the vaporization and the recrystallization, and was investigated by differential thermal analysis (DTA), flourier transform infrared spectroscopy (FT-IR) with attenuated total reflection (ATR), and the inductively coupled plasma optical emission spectroscopy (ICP-OES). The zinc oxide (ZnO) films were prepared by the low-pressure CVD (LP-CVD) using the fibrous Zn(C5H7O2)2·xH 2O and ozone(O3). The DTA curve of the fibrous material with a wide-ranging endothermic peak under 100°C according to desorption of the hydrated water separated to two peaks decreasing in the evaporation temperature. The resistivity of the ZnO films has changed widely from 10 4 to 108 Ωcm by the fibrous material with a different preparation condition.
AB - The fibrous bis (acetylacetonato) zinc (II) (Zn(C5H 7O2)2·xH2O) was prepared with novel apparatus involved the vaporization and the recrystallization, and was investigated by differential thermal analysis (DTA), flourier transform infrared spectroscopy (FT-IR) with attenuated total reflection (ATR), and the inductively coupled plasma optical emission spectroscopy (ICP-OES). The zinc oxide (ZnO) films were prepared by the low-pressure CVD (LP-CVD) using the fibrous Zn(C5H7O2)2·xH 2O and ozone(O3). The DTA curve of the fibrous material with a wide-ranging endothermic peak under 100°C according to desorption of the hydrated water separated to two peaks decreasing in the evaporation temperature. The resistivity of the ZnO films has changed widely from 10 4 to 108 Ωcm by the fibrous material with a different preparation condition.
UR - http://www.scopus.com/inward/record.url?scp=84875885854&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84875885854&partnerID=8YFLogxK
U2 - 10.1088/1742-6596/417/1/012059
DO - 10.1088/1742-6596/417/1/012059
M3 - Conference article
AN - SCOPUS:84875885854
SN - 1742-6588
VL - 417
JO - Journal of Physics: Conference Series
JF - Journal of Physics: Conference Series
IS - 1
M1 - 012059
T2 - 15th International Conference on Thin Films, ICTF 2011
Y2 - 8 November 2011 through 11 November 2011
ER -