Preparation of ZrO2-Y2O3 films by CVD using β-diketone metal chelates

Masanobu Aizawa, Chihiro Kobayashi, Hisanori Yamane, Toshio Hirai

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3 Citations (Scopus)


Films in the system ZrO2-Y2O3 were prepared at 600° to 1000 °C by chemical vapor deposition using β-diketone chelates of Zr and Y and O2. The films having Y2O3 contents from 2 to 12% were obtained at various evaporation temperatures of the sources. The films containing less than 3 mol%Y2O3 were composed of cubic and tetragonal phases. The films containing more than 3 mol%Y2O3 had a cubic crystal structure. The lattice parameter of the cubic phase increased from 5.11 to 5.16 angstroms with increasing Y2O3 content. The deposition rates of the cubic-phase films at 620° and 660 °C were 1.8 and 9.0 μm/h, respectively. The film deposited at 660 °C was composed of randomly oriented fine grains. Dendritic structures were observed for the films deposited above 660 °C. The films exhibited a crystallographic orientation of (100) parallel to the substrate plane.

Original languageEnglish
Pages (from-to)283-286
Number of pages4
JournalJournal of the Ceramic Society of Japan. International ed.
Issue number3
Publication statusPublished - 1993 Mar


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