Preparation of ZrO2-Y2O3 films by CVD using β-diketone metal chelates

Masanobu Aizawa; Chihiro Kobayashi; Hisanori Yamane; Toshio Hirai

Preparation of ZrO₂-Y₂O₃ films by CVD using β-diketone metal chelates

Masanobu Aizawa, Chihiro Kobayashi, Hisanori Yamane, Toshio Hirai

IMRAM - Division of Inorganic Material Research

Toto Ltd.

Research output: Contribution to journal › Article › peer-review

3 Citations (Scopus)

Abstract

Films in the system ZrO₂-Y₂O₃ were prepared at 600° to 1000 °C by chemical vapor deposition using β-diketone chelates of Zr and Y and O₂. The films having Y₂O₃ contents from 2 to 12% were obtained at various evaporation temperatures of the sources. The films containing less than 3 mol%Y₂O₃ were composed of cubic and tetragonal phases. The films containing more than 3 mol%Y₂O₃ had a cubic crystal structure. The lattice parameter of the cubic phase increased from 5.11 to 5.16 angstroms with increasing Y₂O₃ content. The deposition rates of the cubic-phase films at 620° and 660 °C were 1.8 and 9.0 μm/h, respectively. The film deposited at 660 °C was composed of randomly oriented fine grains. Dendritic structures were observed for the films deposited above 660 °C. The films exhibited a crystallographic orientation of (100) parallel to the substrate plane.

Original language	English
Pages (from-to)	283-286
Number of pages	4
Journal	Journal of the Ceramic Society of Japan. International ed.
Volume	101
Issue number	3
Publication status	Published - 1993 Mar

Cite this

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title = "Preparation of ZrO2-Y2O3 films by CVD using β-diketone metal chelates",

abstract = "Films in the system ZrO2-Y2O3 were prepared at 600° to 1000 °C by chemical vapor deposition using β-diketone chelates of Zr and Y and O2. The films having Y2O3 contents from 2 to 12% were obtained at various evaporation temperatures of the sources. The films containing less than 3 mol%Y2O3 were composed of cubic and tetragonal phases. The films containing more than 3 mol%Y2O3 had a cubic crystal structure. The lattice parameter of the cubic phase increased from 5.11 to 5.16 angstroms with increasing Y2O3 content. The deposition rates of the cubic-phase films at 620° and 660 °C were 1.8 and 9.0 μm/h, respectively. The film deposited at 660 °C was composed of randomly oriented fine grains. Dendritic structures were observed for the films deposited above 660 °C. The films exhibited a crystallographic orientation of (100) parallel to the substrate plane.",

author = "Masanobu Aizawa and Chihiro Kobayashi and Hisanori Yamane and Toshio Hirai",

year = "1993",

month = mar,

language = "English",

volume = "101",

pages = "283--286",

journal = "Journal of the Ceramic Society of Japan. International ed.",

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T1 - Preparation of ZrO2-Y2O3 films by CVD using β-diketone metal chelates

AU - Aizawa, Masanobu

AU - Kobayashi, Chihiro

AU - Yamane, Hisanori

AU - Hirai, Toshio

PY - 1993/3

Y1 - 1993/3

N2 - Films in the system ZrO2-Y2O3 were prepared at 600° to 1000 °C by chemical vapor deposition using β-diketone chelates of Zr and Y and O2. The films having Y2O3 contents from 2 to 12% were obtained at various evaporation temperatures of the sources. The films containing less than 3 mol%Y2O3 were composed of cubic and tetragonal phases. The films containing more than 3 mol%Y2O3 had a cubic crystal structure. The lattice parameter of the cubic phase increased from 5.11 to 5.16 angstroms with increasing Y2O3 content. The deposition rates of the cubic-phase films at 620° and 660 °C were 1.8 and 9.0 μm/h, respectively. The film deposited at 660 °C was composed of randomly oriented fine grains. Dendritic structures were observed for the films deposited above 660 °C. The films exhibited a crystallographic orientation of (100) parallel to the substrate plane.

AB - Films in the system ZrO2-Y2O3 were prepared at 600° to 1000 °C by chemical vapor deposition using β-diketone chelates of Zr and Y and O2. The films having Y2O3 contents from 2 to 12% were obtained at various evaporation temperatures of the sources. The films containing less than 3 mol%Y2O3 were composed of cubic and tetragonal phases. The films containing more than 3 mol%Y2O3 had a cubic crystal structure. The lattice parameter of the cubic phase increased from 5.11 to 5.16 angstroms with increasing Y2O3 content. The deposition rates of the cubic-phase films at 620° and 660 °C were 1.8 and 9.0 μm/h, respectively. The film deposited at 660 °C was composed of randomly oriented fine grains. Dendritic structures were observed for the films deposited above 660 °C. The films exhibited a crystallographic orientation of (100) parallel to the substrate plane.

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IS - 3

ER -

Preparation of ZrO₂-Y₂O₃ films by CVD using β-diketone metal chelates

Abstract

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