TY - GEN
T1 - Preparation of α-Al2O3/TiN multilayer coating on Ti(C,N)-based cermet by laser CVD
AU - You, Yu
AU - Ito, Akihiko
AU - Tu, Rong
AU - Goto, Takashi
PY - 2011
Y1 - 2011
N2 - α-Al2O3 and α-Al2O 3/TiN multilayer films were prepared on Ti(C,N)-based cermet substrate by laser chemical vapor deposition.α-Al2O3 and NaCl-type TiN films were prepared at Tdep = 1148 K. α-Al2O3/TiN multilayer film showed dense structure of cross section, and its surface morphology consisted of aggregated spherical grains. The adhesion of α-Al2O3/TiN multilayer film prepared on Ti(C,N)-based cermet was higher as compared with α-Al 2O3 film directly prepared on the cermet.
AB - α-Al2O3 and α-Al2O 3/TiN multilayer films were prepared on Ti(C,N)-based cermet substrate by laser chemical vapor deposition.α-Al2O3 and NaCl-type TiN films were prepared at Tdep = 1148 K. α-Al2O3/TiN multilayer film showed dense structure of cross section, and its surface morphology consisted of aggregated spherical grains. The adhesion of α-Al2O3/TiN multilayer film prepared on Ti(C,N)-based cermet was higher as compared with α-Al 2O3 film directly prepared on the cermet.
KW - Adhesion
KW - Alumina coating
KW - Laser CVD
KW - Ti(C,N)-based cermet
UR - http://www.scopus.com/inward/record.url?scp=79960666399&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=79960666399&partnerID=8YFLogxK
U2 - 10.4028/www.scientific.net/KEM.484.188
DO - 10.4028/www.scientific.net/KEM.484.188
M3 - Conference contribution
AN - SCOPUS:79960666399
SN - 9783037851814
T3 - Key Engineering Materials
SP - 188
EP - 191
BT - Advanced Engineering Ceramics and Composites
PB - Trans Tech Publications Ltd
ER -