Preparation of γ-Al2O3 films by laser chemical vapor deposition

Ming Gao; Akihiko Ito; Takashi Goto

doi:10.1016/j.apsusc.2015.02.196

Preparation of γ-Al₂O₃ films by laser chemical vapor deposition

Ming Gao, Akihiko Ito, Takashi Goto

Materials Processing and Characterization Division

Research output: Contribution to journal › Article › peer-review

11 Citations (Scopus)

Abstract

γ- and α-Al₂O₃ films were prepared by chemical vapor deposition using CO₂, Nd:YAG, and InGaAs lasers to investigate the effects of varying the laser wavelength and deposition conditions on the phase composition and microstructure. The CO₂ laser was found to mostly produce α-Al₂O₃ films, whereas the Nd:YAG and InGaAs lasers produced γ-Al₂O₃ films when used at a high total pressure. γ-Al₂O₃ films had a cauliflower-like structure, while the α-Al₂O₃ films had a dense and columnar structure. Of the three lasers, it was the Nd:YAG laser that interacted most with intermediate gas species. This promoted γ-Al₂O₃ nucleation in the gas phase at high total pressure, which explains the cauliflower-like structure of nanoparticles observed.

Original language	English
Pages (from-to)	160-165
Number of pages	6
Journal	Applied Surface Science
Volume	340
DOIs	https://doi.org/10.1016/j.apsusc.2015.02.196
Publication status	Published - 2015 Jun 15

Keywords

Film
Laser CVD
Microstructure
α-AlO
γ-AlO

ASJC Scopus subject areas

Chemistry(all)
Condensed Matter Physics
Physics and Astronomy(all)
Surfaces and Interfaces
Surfaces, Coatings and Films

Access to Document

10.1016/j.apsusc.2015.02.196

Cite this

@article{6930e6549aa34b13a75a911bd4594daf,

title = "Preparation of γ-Al2O3 films by laser chemical vapor deposition",

abstract = "γ- and α-Al2O3 films were prepared by chemical vapor deposition using CO2, Nd:YAG, and InGaAs lasers to investigate the effects of varying the laser wavelength and deposition conditions on the phase composition and microstructure. The CO2 laser was found to mostly produce α-Al2O3 films, whereas the Nd:YAG and InGaAs lasers produced γ-Al2O3 films when used at a high total pressure. γ-Al2O3 films had a cauliflower-like structure, while the α-Al2O3 films had a dense and columnar structure. Of the three lasers, it was the Nd:YAG laser that interacted most with intermediate gas species. This promoted γ-Al2O3 nucleation in the gas phase at high total pressure, which explains the cauliflower-like structure of nanoparticles observed.",

keywords = "Film, Laser CVD, Microstructure, α-AlO, γ-AlO",

author = "Ming Gao and Akihiko Ito and Takashi Goto",

note = "Funding Information: This research was supported in part by the Global COE Program of Materials Integration, Tohoku University; in part by a cooperative program (Proposal No. 14G0401 ) of CRDAM-IMR, Tohoku University ; and in part by the Japan Society for the Promotion of Science , Grant-in-Aid for Young Scientists (A), 25709069 . Publisher Copyright: {\textcopyright} 2015 Elsevier B.V. All rights reserved.",

year = "2015",

month = jun,

day = "15",

doi = "10.1016/j.apsusc.2015.02.196",

language = "English",

volume = "340",

pages = "160--165",

journal = "Applied Surface Science",

issn = "0169-4332",

publisher = "Elsevier",

}

TY - JOUR

T1 - Preparation of γ-Al2O3 films by laser chemical vapor deposition

AU - Gao, Ming

AU - Ito, Akihiko

AU - Goto, Takashi

N1 - Funding Information: This research was supported in part by the Global COE Program of Materials Integration, Tohoku University; in part by a cooperative program (Proposal No. 14G0401 ) of CRDAM-IMR, Tohoku University ; and in part by the Japan Society for the Promotion of Science , Grant-in-Aid for Young Scientists (A), 25709069 . Publisher Copyright: © 2015 Elsevier B.V. All rights reserved.

PY - 2015/6/15

Y1 - 2015/6/15

N2 - γ- and α-Al2O3 films were prepared by chemical vapor deposition using CO2, Nd:YAG, and InGaAs lasers to investigate the effects of varying the laser wavelength and deposition conditions on the phase composition and microstructure. The CO2 laser was found to mostly produce α-Al2O3 films, whereas the Nd:YAG and InGaAs lasers produced γ-Al2O3 films when used at a high total pressure. γ-Al2O3 films had a cauliflower-like structure, while the α-Al2O3 films had a dense and columnar structure. Of the three lasers, it was the Nd:YAG laser that interacted most with intermediate gas species. This promoted γ-Al2O3 nucleation in the gas phase at high total pressure, which explains the cauliflower-like structure of nanoparticles observed.

AB - γ- and α-Al2O3 films were prepared by chemical vapor deposition using CO2, Nd:YAG, and InGaAs lasers to investigate the effects of varying the laser wavelength and deposition conditions on the phase composition and microstructure. The CO2 laser was found to mostly produce α-Al2O3 films, whereas the Nd:YAG and InGaAs lasers produced γ-Al2O3 films when used at a high total pressure. γ-Al2O3 films had a cauliflower-like structure, while the α-Al2O3 films had a dense and columnar structure. Of the three lasers, it was the Nd:YAG laser that interacted most with intermediate gas species. This promoted γ-Al2O3 nucleation in the gas phase at high total pressure, which explains the cauliflower-like structure of nanoparticles observed.

KW - Film

KW - Laser CVD

KW - Microstructure

KW - α-AlO

KW - γ-AlO

UR - http://www.scopus.com/inward/record.url?scp=84926166506&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84926166506&partnerID=8YFLogxK

U2 - 10.1016/j.apsusc.2015.02.196

DO - 10.1016/j.apsusc.2015.02.196

M3 - Article

AN - SCOPUS:84926166506

SN - 0169-4332

VL - 340

SP - 160

EP - 165

JO - Applied Surface Science

JF - Applied Surface Science

ER -