Preparing 3D graphene nanowall-nickel hybrid electrode on quartz glass for on-chip micro-supercapacitors

Jinhua Li; Takahito Ono

doi:10.1109/MEMSYS.2017.7863544

Preparing 3D graphene nanowall-nickel hybrid electrode on quartz glass for on-chip micro-supercapacitors

Jinhua Li, Takahito Ono

ENG - Mechanical Systems Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

We report a type of MEMS-technique processable micro-supercapacitors built on 3D graphene nanowall (GNW)/Ni core-shell electrodes. While the growth of GNW on quartz glass and other conductive substrates were rationally revealed, the microfabrication of hybrid electrodes was realized by uniformly coating Ni on GNW to simultaneously serve as a shadow mask for patterning and an active material for capacitance augmentation. With 10-fold larger capacitance of 337 F/cm³ than that using pure GNW and Ni, the core-shell electrodes enabled a high on-chip energy and power density delivery of the capacitor. The non-catalytic growth and micromachining strategy possibly promote applying GNW in various microsystems.

Original language	English
Title of host publication	2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	861-864
Number of pages	4
ISBN (Electronic)	9781509050789
DOIs	https://doi.org/10.1109/MEMSYS.2017.7863544
Publication status	Published - 2017 Feb 23
Event	30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017 - Las Vegas, United States Duration: 2017 Jan 22 → 2017 Jan 26

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume	0
ISSN (Print)	1084-6999

Other

Other	30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017
Country/Territory	United States
City	Las Vegas
Period	17/1/22 → 17/1/26

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/MEMSYS.2017.7863544

Cite this

Li, J., & Ono, T. (2017). Preparing 3D graphene nanowall-nickel hybrid electrode on quartz glass for on-chip micro-supercapacitors. In 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017 (pp. 861-864). [7863544] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 0). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2017.7863544

Preparing 3D graphene nanowall-nickel hybrid electrode on quartz glass for on-chip micro-supercapacitors. / Li, Jinhua; Ono, Takahito.
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017. Institute of Electrical and Electronics Engineers Inc., 2017. p. 861-864 7863544 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 0).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Li, J & Ono, T 2017, Preparing 3D graphene nanowall-nickel hybrid electrode on quartz glass for on-chip micro-supercapacitors. in 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017., 7863544, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), vol. 0, Institute of Electrical and Electronics Engineers Inc., pp. 861-864, 30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017, Las Vegas, United States, 17/1/22. https://doi.org/10.1109/MEMSYS.2017.7863544

Li J, Ono T. Preparing 3D graphene nanowall-nickel hybrid electrode on quartz glass for on-chip micro-supercapacitors. In 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017. Institute of Electrical and Electronics Engineers Inc. 2017. p. 861-864. 7863544. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2017.7863544

Li, Jinhua ; Ono, Takahito. / Preparing 3D graphene nanowall-nickel hybrid electrode on quartz glass for on-chip micro-supercapacitors. 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017. Institute of Electrical and Electronics Engineers Inc., 2017. pp. 861-864 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

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abstract = "We report a type of MEMS-technique processable micro-supercapacitors built on 3D graphene nanowall (GNW)/Ni core-shell electrodes. While the growth of GNW on quartz glass and other conductive substrates were rationally revealed, the microfabrication of hybrid electrodes was realized by uniformly coating Ni on GNW to simultaneously serve as a shadow mask for patterning and an active material for capacitance augmentation. With 10-fold larger capacitance of 337 F/cm3 than that using pure GNW and Ni, the core-shell electrodes enabled a high on-chip energy and power density delivery of the capacitor. The non-catalytic growth and micromachining strategy possibly promote applying GNW in various microsystems.",

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AB - We report a type of MEMS-technique processable micro-supercapacitors built on 3D graphene nanowall (GNW)/Ni core-shell electrodes. While the growth of GNW on quartz glass and other conductive substrates were rationally revealed, the microfabrication of hybrid electrodes was realized by uniformly coating Ni on GNW to simultaneously serve as a shadow mask for patterning and an active material for capacitance augmentation. With 10-fold larger capacitance of 337 F/cm3 than that using pure GNW and Ni, the core-shell electrodes enabled a high on-chip energy and power density delivery of the capacitor. The non-catalytic growth and micromachining strategy possibly promote applying GNW in various microsystems.

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Preparing 3D graphene nanowall-nickel hybrid electrode on quartz glass for on-chip micro-supercapacitors

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