Prevention of surface corrugation thermal deformation for InGaAsP/InP DFB lasers

Haruo Nagai; Yoshio Noguchi; Takashi Matsuoka; Yoshio Suzuki

doi:10.1143/JJAP.22.L291

Prevention of surface corrugation thermal deformation for InGaAsP/InP DFB lasers

Haruo Nagai, Yoshio Noguchi, Takashi Matsuoka, Yoshio Suzuki

New Industry Creation Hatchery Center (NICHe)

Nippon Telegraph & Telephone

Research output: Contribution to journal › Article › peer-review

27 Citations (Scopus)

Abstract

Thermal deformation mechanism for surface corrugations fabricated on InP and InGaAsP crystal surfaces has been analyzed, and threshold value existence for PH₃partial pressure in H₂ambient to prevent the deformation is shown. It has been verified that as-fabricated corrugation height can be conserved even after the LPE process by preventing thermal deformation before growth and by retaining an adequate supersaturation for the growth melt. Applying the results of these studies, heterostructures for 1.3∼1.5 µm region DFB lasers with first order grating of near 1000 Å corrugation height have been fabricated.

Original language	English
Pages (from-to)	L291-L293
Journal	Japanese Journal of Applied Physics
Volume	22
Issue number	5
DOIs	https://doi.org/10.1143/JJAP.22.L291
Publication status	Published - 1983 May

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title = "Prevention of surface corrugation thermal deformation for InGaAsP/InP DFB lasers",

abstract = "Thermal deformation mechanism for surface corrugations fabricated on InP and InGaAsP crystal surfaces has been analyzed, and threshold value existence for PH3partial pressure in H2ambient to prevent the deformation is shown. It has been verified that as-fabricated corrugation height can be conserved even after the LPE process by preventing thermal deformation before growth and by retaining an adequate supersaturation for the growth melt. Applying the results of these studies, heterostructures for 1.3∼1.5 µm region DFB lasers with first order grating of near 1000 {\AA} corrugation height have been fabricated.",

author = "Haruo Nagai and Yoshio Noguchi and Takashi Matsuoka and Yoshio Suzuki",

year = "1983",

month = may,

doi = "10.1143/JJAP.22.L291",

language = "English",

volume = "22",

pages = "L291--L293",

journal = "Japanese Journal of Applied Physics",

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publisher = "Japan Society of Applied Physics",

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T1 - Prevention of surface corrugation thermal deformation for InGaAsP/InP DFB lasers

AU - Nagai, Haruo

AU - Noguchi, Yoshio

AU - Matsuoka, Takashi

AU - Suzuki, Yoshio

PY - 1983/5

Y1 - 1983/5

N2 - Thermal deformation mechanism for surface corrugations fabricated on InP and InGaAsP crystal surfaces has been analyzed, and threshold value existence for PH3partial pressure in H2ambient to prevent the deformation is shown. It has been verified that as-fabricated corrugation height can be conserved even after the LPE process by preventing thermal deformation before growth and by retaining an adequate supersaturation for the growth melt. Applying the results of these studies, heterostructures for 1.3∼1.5 µm region DFB lasers with first order grating of near 1000 Å corrugation height have been fabricated.

AB - Thermal deformation mechanism for surface corrugations fabricated on InP and InGaAsP crystal surfaces has been analyzed, and threshold value existence for PH3partial pressure in H2ambient to prevent the deformation is shown. It has been verified that as-fabricated corrugation height can be conserved even after the LPE process by preventing thermal deformation before growth and by retaining an adequate supersaturation for the growth melt. Applying the results of these studies, heterostructures for 1.3∼1.5 µm region DFB lasers with first order grating of near 1000 Å corrugation height have been fabricated.

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SP - L291-L293

JO - Japanese Journal of Applied Physics

JF - Japanese Journal of Applied Physics

IS - 5

ER -

Prevention of surface corrugation thermal deformation for InGaAsP/InP DFB lasers

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