Process and properties of Pt/Pb(Zr,Ti)O3/Pt integrated ferroelectric capacitors

K. Torii, H. Kawakami, H. Miki, K. Kushida, T. Itoga, Y. Goto, T. Kumihashi, N. Yokoyama, M. Moniwa, K. Shoji, T. Kaga, Y. Fujisaki

    Research output: Contribution to journal › Article › peer-review

    21 Citations (Scopus)

    Fingerprint

    Dive into the research topics of 'Process and properties of Pt/Pb(Zr,Ti)O3/Pt integrated ferroelectric capacitors'. Together they form a unique fingerprint.

    Material Science

    Physics