| Original language | English |
|---|---|
| Pages (from-to) | 865-867 |
| Number of pages | 3 |
| Journal | Journal of Materials Science Letters |
| Volume | 11 |
| Issue number | 12 |
| DOIs | |
| Publication status | Published - 1992 Jan |
Production of a TiN film with nanoscale particle size by a combined method of plasma-alloy reaction and spray deposition
A. Inoue, B. G. Kim, K. Nosaki, T. Yamaguchi, T. Masumoto
Research output: Contribution to journal › Article › peer-review
5
Citations
(Scopus)