Production of a TiN film with nanoscale particle size by a combined method of plasma-alloy reaction and spray deposition

A. Inoue, B. G. Kim, K. Nosaki, T. Yamaguchi, T. Masumoto

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)
Original languageEnglish
Pages (from-to)865-867
Number of pages3
JournalJournal of Materials Science Letters
Issue number12
Publication statusPublished - 1992 Jan

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