TY - GEN
T1 - Profile measurement by using a femtosecond laser chromatic confocal probe
AU - Sato, Ryo
AU - Shimizu, Yuki
AU - Matsukuma, Hiraku
AU - Gao, Wei
N1 - Publisher Copyright:
Copyright © 2020 JSME. Published with permission.
PY - 2020
Y1 - 2020
N2 - Confocal probes are widely employed in many industrial fields due to the depth-sectioning effect. The author’s group has also proposed a chromatic confocal probe employing a mode-locked femtosecond laser source which can realize an axial resolution of 30 nm and a measurement range of 40 µm. Efforts have also been made to improve the thermal stability of the developed femtosecond laser chromatic confocal probe so that the probe can be applied for long-term displacement measurement or surface profile measurement. Meanwhile, surface profile measurement has not been carried out by using the developed femtosecond laser chromatic confocal probe. For the verification of the performance of developed probe in profile measurement, in this paper, an experimental setup is built and a basic experiment is carried out. By using the probe with further improved thermal stability, the measurement of a sample surface profile is carried out. In this paper, the development of the experimental setup with the femtosecond laser chromatic confocal probe, as well as the results of the surface profile measurements, is presented.
AB - Confocal probes are widely employed in many industrial fields due to the depth-sectioning effect. The author’s group has also proposed a chromatic confocal probe employing a mode-locked femtosecond laser source which can realize an axial resolution of 30 nm and a measurement range of 40 µm. Efforts have also been made to improve the thermal stability of the developed femtosecond laser chromatic confocal probe so that the probe can be applied for long-term displacement measurement or surface profile measurement. Meanwhile, surface profile measurement has not been carried out by using the developed femtosecond laser chromatic confocal probe. For the verification of the performance of developed probe in profile measurement, in this paper, an experimental setup is built and a basic experiment is carried out. By using the probe with further improved thermal stability, the measurement of a sample surface profile is carried out. In this paper, the development of the experimental setup with the femtosecond laser chromatic confocal probe, as well as the results of the surface profile measurements, is presented.
KW - Chromatic confocal probe
KW - Measurement resolution
KW - Mode-locked femtosecond laser
KW - Thermal stability
UR - http://www.scopus.com/inward/record.url?scp=85100926689&partnerID=8YFLogxK
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U2 - 10.1115/LEMP2020-8626
DO - 10.1115/LEMP2020-8626
M3 - Conference contribution
AN - SCOPUS:85100926689
T3 - JSME 2020 Conference on Leading Edge Manufacturing/Materials and Processing, LEMP 2020
BT - JSME 2020 Conference on Leading Edge Manufacturing/Materials and Processing, LEMP 2020
PB - American Society of Mechanical Engineers
T2 - JSME 2020 Conference on Leading Edge Manufacturing/Materials and Processing, LEMP 2020
Y2 - 3 September 2020
ER -