Projection type micro-optical encoder based on MEMS technology

Yigui Li, Tetsuo Endo, Kazuhiro Hane

Research output: Contribution to journalArticlepeer-review

6 Citations (Scopus)


The principle of projection type micro-optical encoder has been described and the optics theory of grating imaging is deduced. And the encoder is developed based on MEMS technology. The integrated encoder consists of scale grating, index grating and photodiodes therefore it is compact and easy to alignment. Experiment indicates that the fabricated encoder can measure the displacement and is feasible and has obvious advantages both in cost and miniaturization compared with traditional optic encoder.

Original languageEnglish
Pages (from-to)1005-1007
Number of pages3
JournalGuangxue Xuebao/Acta Optica Sinica
Issue number8
Publication statusPublished - 2003 Aug 1


  • Grating imaging
  • Micro-opto-electromechanical system (MOEMS)
  • Projection type encoder

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics


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