Properties of TixC1 - x films coated on molybdenum by magnetron sputtering

T. Shikama, H. Shinno, M. Fukutomi, M. Fujitsuka, M. Kitajima, M. Okada

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30 Citations (Scopus)


Properties of TixC1 - x (0.3 ≤ x ≤ 0.6) films deposited onto molybdenum have been examined as functions of their chemical composition. TixC1 - x films about 4-6 μm thick were deposited onto a sintered molybdenum substrate at 600 °C by magnetron sputtering. The near-stoichiometric TixC1 - x (x ≈ 0.5) was found to be the most thermally stable. Titanium excess TixC1 - x (x > 0.5) loses titanium by evaporation and changes its surface morphology above 1200 °C. However, excess titanium will improve the ductility of deposited films. Strong compressive stress was observed in carbon excess TixC1 - x (x < 0.5). The carbon excess TixC1 - x is more resistant against thermal evaporation than the stoichiometric compound. However, enhanced diffusion of molybdenum atoms into the carbon excess TixC1 - x takes place, with the formation of Mo2C. This Mo2C formation nearly prohibits the use of carbon excess TixC1 - x films coated on molybdenum as the first-wall material in fusion devices.

Original languageEnglish
Pages (from-to)233-242
Number of pages10
JournalThin Solid Films
Issue number3
Publication statusPublished - 1983 Mar 18

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry


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